0.

VQZ100 VQZ100-S-01(R) (-Q)Note) Note) For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. 01 02 VQZ200 VQZ200-S(-Q) Caution 02 03 VQZ300 VQZ300-S(-Q) Thread type Note) R indicates external pilot type. Except VQZ100, external pilot type and internal pilot type are common.

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

ZSM1-115/121

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode. Ex.) When an error count (number of the failure predict) (EC) is set to be 3.

Vacuum Gripper

TQ1230001-OM102-B 2.

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

Vacuum Filter AFJ Series

Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications

Vacuum Gripper

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Guide Cylinder Series MGG

Features 2 Guide Cylinder 20, 25, 32, 40, 50, 63, 80, 100 Series MGG How to Order MGG L B 32 100 C73 Guide cylinder Number of auto switches 2 pcs. 1 pc. "n" pcs. Nil S n Bearing type Slide bearing Ball bushing M L Auto switch type Mounting type Nil Without auto switch (built-in cylinder magnet) Basic Front mounting flange B F Refer to the table below for auto switch models.

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

Electro-Pneumatic Positioner

Cable connector (option) 63 (S type: 39) L1=101 (S type: 77) Part name Part number Suited cable outer diameter 7 to 9 Resin-made cable clamp unit (A) P368010-26 M8 x 1.25 9 to 11 Resin-made cable clamp unit (B) P368010-27 M8 x 1.25 Actuator main shaft Actuator main shaft Side mounting with the fork lever assembly M Side mounting with the fork lever assembly S Cable connector G1/2 Exploded

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

FSQ seies

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__

Air Cylinder RSQ Series Stopper Cylinder

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) PB PA (mm) Dimensions A B S Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 14 12.5 26 26 29.5 With bypass (Max. T) (mm) Dimensions PB T U Model LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm PA 28 9.6 34 17.5 A B 35 20 U 57 25 With flow rate adjustment & bypass (Max. T) (Max.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

MHC2

Operating equipment: MHC2-6D A part a b c d e f = 20 (mm) = 3 (mm) = 4 (mm) = 4 (mm) = 5 (mm) = 6 (mm) b c a e B part f d z f1 x.Calculate the inertial moment of the attachment. Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).