Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: Reverse Mounting Prevention Pin, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: Reverse Mounting Prevention Pin, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

DOC1003077

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

MGZ Series

N S + Stroke H B ZZ + Stroke Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18

VXZ

K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual

21

Example: Power supply voltage 24 VDC Auto switch internal voltage drop 4 V Example: Load impedance 3 k Auto switch leakage current 1 mA (Solid state) When two auto switches are connected in parallel, malfunction may occur because the load voltage will increase in the OFF state.

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

1) B Note 2) K Note 3) N None DIN rail length specified Back pressure check valve Special wiring specifications (Except double wiring) With name plate (Side ported only) Manifold mounting D E DIN rail mounting Direct mounting Note 1) Specify DIN rail length with D at the end.

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

Note 4) Specify -K for wiring specification for cases below. All single wiring Single and double mixed wiring When there are stations which do not require wiring (e.g. single SUP spacer), specify the wiring specification in the manifold specification so that the number of the solenoids is 16 maximum.

VXS

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

System), 1st Selection Supply Valve and Release Valve: K (N.C.