IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Clean Rodless Cylinder Series CYP

69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Direct Operated Precision Regulator Modular Style Series ARP3000 1

ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

Oil Filter FH150 Series

4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9

NCA1

1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 3/4 1 15/64 1/2 1/2 1/2 7/8 3/8 Bore size (in) SA XA ZA 150 (1.5") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style

NCA1

") 1 6 1/8 6 1/8 3 3/4 2.48 2.13 1 3/8 2 1/4 1.06 1.30 1 1/2 3/8 1/8 3/8 9/16 0 1 3 5/8 5/16-24 3 1/8 7/8 3/8 1/2 3.1 1 1/8 1 1/8 6 11/16 3/4-16 1 325 (3.25") 7 1/8 7 3/8 4 1/4 2.72 2.59 1 5/8 2 3/4 1.18 1.57 2 5/8 11/64 1/2 3/4 0 1 1/4 3 3/4 15/16 3/8-24 1 3 13/16 1 1/4 1/2 5/8 3.9 1 1/2 1 5/8 7 7/8 1-14 1 3/8 400 (4") 7 1/8 7 3/8 4 1/4 2.72 2.59 1 5/8 3 1/2 1.18 1.57 2 5/8 15/64 1/2 3/4

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

HRX-OM-X037

Refer to Table 5.4-6 Offset setting for details. (1) (2) Offset setting Table 5.4-6 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

HRX-OM-Y098

to 3 .5-60 Setting of contact output signal 4 to 6 .5-60 5.4.11 How to set the IP address .5-66 5.4.12 Temperature waveform screen.5-66 Chapter 6 Alarm Notifications and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 HRL Series

HRX-OM-W060

to 3 .5-57 Setting of contact output signal 4 to 6 .5-57 5.4.11 Temperature waveform screen.5-62 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-1

Cylinder with Lock

8)*1 65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 S I 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20