VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

IDU/IDF

Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

IDX-OM-W053

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

CEx-OMQ0011

. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4

Table of Contents - Tubing

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

IDX-OM-V020

. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION

E-P HYREG

4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300/1301 1 1 1 0.9 0.9 0.9

IDX-OM-U010

DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS

Sine Cylinder Series REC

Trunnion (With nut) CM-T020B CM-T040B When ordering foot bracket, order 2 pieces per cylinder. 3 liners are included in the clevis bracket for adjusting an angle when mounting it. Clevis pin and retaining ring (cotter pin for 40) are packaged together. CM-T032B 1029 Series REC Construction !7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !

Sine Cylinder Series REC

Trunnion (With nut) CM-T020B CM-T040B When ordering foot bracket, order 2 pieces per cylinder. 3 liners are included in the clevis bracket for adjusting an angle when mounting it. Clevis pin and retaining ring (cotter pin for 40) are packaged together. CM-T032B 1029 Series REC Construction !7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !

3 Port Air Operated Valve Series SYJA300 1

Function plate (DXT060-32-4A) 6 Valve Functions Available by Changing of Piping Port 3 port N.C. 3 port N.O. 2 port N.C. 2 port N.O.

Miniature Guide Rod Cylinder Series MGJ

6 w i !4 !3 y u r !1 q t !2 !5 e !1 No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

IDX-OM-W093

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5

Compressed Air Preparation Filter

pressure 0.3 MPa 5 6 Inlet pressure 0.5 MPa 4 4 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 4 3 2 2 2 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 10 11 12 0 0 5 6 7 8 0 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 0 2 1 3 4 5 6 7 8 9 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 6 AFF/AM/AMD Series Micro Mist Separator

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

IDX-OM-W095

5-3 IDX-OM-W095 6 6.1 OFF ON OFF OFF T 600mm 1 6.2 10% 600mm 1 OFF ON 10% 3 3 IDFC60/70/80/90 Series 6-1 IDX-OM-W095 600mm 1 2 INOUT IN OUT O IDFC60/70/80/90 Series 6-2 IDX-OM-W095 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFC60/70/80/90 Series 6-3 IDX-OM-W095 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFC60/70/80/90 Series 6-4 IDX-OM-W095 7 7.1 IDFC60-23 IDFC70-23