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Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Caution Be sure

Nil (Example) F9BW 3 m L (Example) F9BWL 5 m Z (Example) F9BWZ None N (Example) J79CN marked solid state switches are produced upon receipt of order.

Nil (Example) F9BW 3 m L (Example) F9BWL 5 m Z (Example) F9BWZ None N (Example) J79CN marked solid state switches are produced upon receipt of order.

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

min] ON OFF [] PFMB7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMB7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMB7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(28)[F 2]OUT2(36) -22No.PF-OMP0001CN-F <> 1 [P_1][n_1][] 500 L/min

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Example of Selection from Minimum Operating Flow 100 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 l/min (ANR). 90 31 {l/min (ANR)} 5 {l/min (ANR)} 80 N = 6 (unit) Vacuum pressure (kPa) 70 Q2 = 5.0 l/min (ANR) 60 Table 1.

Clean Regulator/Fluororesin Type SRF Series RoHS ARJ AR425 to 935 ARX Wetted part materials Wetted part materials Wetted part materials Body: New PFA Body: New PFA AMR Body: New PFA ARM Diaphragm: PTFE Diaphragm: PTFE Diaphragm: PTFE ARP IR-A IR Recommended maximum flow rate IRV 2 L/min 5 L/min 20 L/min VEX SRF10 SRF30 SRF50 SRH SRP SRF SRF Inlet pressure: 0.3 MPa, Fluid: Water ITV Washing

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

min 2.5 to 100 L/min 5 to 200 L/min Operating Fluid temperature *2 0 to 85oC (No condensation or freezing) Repeatability Analogue output: +/-1.5F.S.

02S 2 R R L C VHK 04F 04F Flame resistant type Flame resistant cover Nil No Bracket Valve model With cover (For One-touch fitting only) L Nil With L-bracket None C 2 port valve 2 3 port valve 3 Flame resistant type Bracket and screws are attached. 1(P) port size 4 04F 1(P) nob color 6 06F Gray Nil (Standard) Blue 2 port valve 3 port valve 2(A) port size 8 08F 10 10F 4 04F Red R (Option)

n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .

n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 () 1 ON ( +)ON ()ON OFF Yes 2 No ( OFF +)

M Nut: Aluminum + Ni plated VCKK, VCKL only N Component Parts Part no.

Size 2 (VDW2) 2 2.3 6 One-touch fitting 24 VAC 3.2 12 VDC K L M N P Q Low concentration ozone resistant (Seal material: FKM) 1.6 M5 2.3 VCH Oil-free 3.2 Aluminum G thread 1.6 VDW VDW NPT thread 1/8 2.3 With bracket (Aluminum body only) 3.2 SX10 DimensionsPage 463 (Single unit) VQ LVM 457 VDW Series Single Unit For Medium Vacuum This valve can also be used with air.