Clean Gas Filter

Port size IDFA Port size Rc, NPT, TSJ, UOJ 1/4 02 Symbol IDFB Model size IDH Symbol Rated flow rare L/min(ANR) 10 20 30 Up to 26 Up to 70 Up to 140 Elements are replaceable. ID IDG Connection IDK Symbol Connection (IN, OUT) 0 1 2 3 Rc NPT TSJ UOJ AMG AFF SFA302 AM AMD SFA103 Model SFA200 AMH Model Rated flow rate L/min (ANR) Note 1) Element part no.

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

Copper-free Actuators

20-CQSlS Anti-lateral load Compact cylinder Series CDQS (Note 2, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area(mm2) Effective area(mm2) 40 0.6 0.1 0.2 30

AMF

3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5

MGZ Series

(Approx. 30% reduction) Clean external appearance Piping is centralized on the head cover. Auto switches are contained in grooves on four sides. Application examples Press Chuck Pusher Robot Shooter Lifter 3 Series MGZ Non-rotating Double Power Cylinder How to Order MGZ 100 40 Z73 Standard Type Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5% F.S. or less (at 25C water) Repeatability 1% F.S. or less (at 25C water) Temperature characteristics 5% F.S. or less (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for display unit PF2D 300/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30

Series AS-FM/AS-M/ASD-FM

Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa 0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Trimmer Auto Switch Series D-
7K/D-R
K

D-RNK 21.1 6 30 2-3.5 46 5 Connector for sensor e-con 3

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) One touch fitting lot Ve' tube r: :-,1 o.o97 \44) r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

3 Port Solenoid Valve SYJ300/500/700 Series

Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21 SYJ500 .pages 22-23 SYJ700 .pages 24-25 SYJA .pages 26-27 Q Q Q Drawings.page 29 Q SYJ300 .pages 30

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.