FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2 0.5 2 30 0.1 0.3 10A FMW-4200-2-10 0.2 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45 1 1.6 15A FMW-4200-30 0.5 30 60 1.8

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: 1 [-30 in.Hg to 100 psig (-0.1 to 0.7 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

7.4

Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.

Trimmer Auto Switch

(mm) or () Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Parallel style MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 Parallel style MHZL2 6.0 7.0 10.0 11.0 Wide type MHL2 7.0 8.0 8.5 10.5 11.0 12.5 Parallel style MHS2 (2 fingers) 6.5 7.0 7.5 8.5 Parallel style MHS3 (3 fingers)/MHS(L)3 6.5 7.0 7.5 8.0 Parallel style MHS4 (4 fingers) 6.5 7.0 7.5 8.5 Angular style MHC2 30 to 10 30

AP500

SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30