)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104 F (5 to 40 C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.