AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

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Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

Title not found

Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

PF2D

Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Parallel Type Air Gripper

Specifications 1-1 Specifications Specifications Model MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Cylinder inside diameter (mm) 10 16 20 25 32 40 Fluid Air Double acting: D 0.2 to 0.7 0.1 to 0.7 Operating pressure (Mpa) Normally open: S 0.35 to 0.7 0.25 to 0.7 Normally Single acting closed: C Ambient and fluid temperature (oC) 10 to 60 Repeatability (mm) +/-0.01 +/-0.02 Maximum operating

VQC

19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

One-touch Fittings

Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Modular Type Filter Regulator Series AW

Note Description AW10, 20 AW30 AW40, 40-06 1 2 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Polyacetal Replacement parts Part no. Description No.

IDX-OM-W023

IDX-OM-W023-B / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 )

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20