MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

ZP

3.5 x 7 to 8 x 30 For work pieces with limitations on the adsorption surface How to Order 3507 W N ZP2 Pad unit Pad material Pad size Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020

REA/REB

RS H A RZQ Operating Range MI W S Bore size (mm) Auto switch model 25 10 40 32 20 15 CEP1 D-A7/A8 6 6 6 6 6 6 D-F7/J7/F79F 3 3 3.5 3 3 4 CE1 Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion) There may be the case it will vary substantially depending on an ambient environment.

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

AC

G How to Order AL JIS symbols AW 30 03 BG 50 2N Option Filter Regulator 1 (1) Set at 0.02 to 0.2MPa 2 6 8 Metal bowl Filter regulator with residual pressure exhaust mechanism Nylon bowl Body size Metal bowl with level gauge 30 40 3/8 1/2 J (2) Drain guide N R Non relieving style Flow direction: Right to left Thread W With drain cock and barb fittings (For nylon 6/4) Rc(PT) NPT G(PF) N F

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

dimension Size 30 50 63 80 100 6.8 8.5 10.3 8 11 6.8 8.5 10.3 8 11 3 x 3 x 14 5 x 5 x 25 6 x 6 x 30 6 x 6 x 40 8 x 7 x 45 6.8 8.5 10.3 8 11-7-34 35 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D2011-7-35 36 Series CRA1 (Size: 30, 50, 63, 80, 100) Simple Specials: -XA33 to -XA46: Shaft Pattern Sequencing II Shaft shape pattern is dealt with simple made-to-order system.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

dimension Size 30 50 63 80 100 6.8 8.5 10.3 8 11 6.8 8.5 10.3 8 11 3 x 3 x 14 5 x 5 x 25 6 x 6 x 30 6 x 6 x 40 8 x 7 x 45 6.8 8.5 10.3 8 11-7-34 35 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D2011-7-35 36 Series CRA1

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

CM2

. 1/8 1/8 1/8 1/4 15.5 13 5 15 10 5 M20 X 1.5 9 9 28 18 19 30 14 24 8 M8 X 1.25 24 25 13 8 41 20 20 33.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

F

6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102 73 44 KM11-08-12-6 6 85 55 44 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 KM11-08-12-10 10 116 86 62 L5 FB N L1 L2 L3 L4 L6 P Q1 Q2 MA MB FA B Port Min Weight Model Inside Dia (g) (Inch Size) 19.5 6 10.6 5/16 65 10 18

CQS

5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 RR CZ CX CW CU CT CD 6 6 9 10 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

Environment

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

CL

198 207 20 33.5 7 5.5 45 7 M10 x 1.25 6 15 30 30 24 27 M26 x 1.5 41 24 137 9 14 212 221 25 37.5 45 7 5.5 7 M10 x 1.25 6 15 30 34.5 27 24 M26 x 1.5 41 24 139 9 14 214 223 32 50 46.5 8 7 7 M14 x 1.5 8 21.5 29 39 42.5 24 M32 x 2 41 24 167 11 18 256 267 40 Clevis pin and snap ring (40: cotter pin) are shipped together. 9-2-25 24 Series CLM2 Head Side Trunnion Style (T) CLM2T Bore size Stroke

VM

x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch

HRX-OM-X037

6.

Micro Mechanical Valve Series VM1000

x M20 x 1 Lock nut Thickness 6, Width across flats 27 OFF ON Max. 10 Symbol 2 port 60.8 (A) 2 23 R port (3 port only) 33.5 12 10 112.8 1 (P) 3 port (A) 2 52 22 13 12 10 32 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 25 30 40 * 0.5 MPa supply F .O.F .* 12 N T.T. 60 Push button (Mushroom) VM220-02-30 (R, B, G, Y) A VM230-02-30 (R, B, G, Y) A Panel mounting hole 40 T.T. 29.5 22.1 Max. 6 3

Possible to transfer a workpiece at low-speed.

Cushion J MSU 80 to 100, 170 to 190 Rotating angle K Double round shaft Port size Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8 M5 x 0.8 CRJ Mountable Auto switch CRA1 Dimensions CRQ2 J K T Shaft type Size 20, 30, 40 MSQ MSZ CRQ2X MSQX CRQ2X MSQX MRQ Form Size 10, 15 D (g6) G W H M N UT UJ UK Size 10 15 20 30 40 5 4.5 18 9 6 35 44 53 6 5.5 20 10 7 40 50 60 8 0 0.1 10 0 0.1 11 0 0.1 10 30 15 11 59 74

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

High Purity Fluoropolymer

Model Panel thickness (Max. t) J L K J M N T W H E W 4 6 LQ2P22 LQ2P21 14.5 (M) 6 18 73 19.9 19 7 16 10 LQ2P52 LQ2P51 LQ2P42 LQ2P41 LQ2P33 LQ2P32 LQ2P31 (E) (E) 83 H 20.5 6 8 6 24 26.2 22 7 24 (L) Class 2, 3 95 82 Panel aperture K 12 19 10 12 24.5 9 30 33.1 21 28 7 30 110 93 (M) 30.5 N 9 36 40 26 32 10 36 108 H Inch sizes Class 4, 5 Applicable tubing O.D.