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Please check the pressure differential and flow to select the appropriate size of the valve referring to the Flow-rate Characteristics on page 36. Ensure that pressure differential does not become lower than 0.01 MPa during ON (N.C.: Valve open).

Non-Rotating Rod and Double Rod Non-Rotating . 17 to 24 Stainless Steel Rod (XC6) Low Speed (XB9) . 25 High Temperature (XB6) / Low Temperature (XB7) ... 26 Special Trunnion Location (X46US) . 27 & 28 Oversized Rod with Special Trunnion Location (XB5 X46US) . 29 Stainless Steel Tie Rods / Tie Rod Nuts (X130US) 30 Rod Boot . 31 Oversized Rod / Standard Rod and Non-Rotating (XB5 / X119US) .. 32 to 36

Acceleration/de celeration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min). 36 - 5.5 Changing I/O Signal Allocation I/O signal assignment can be changed as appropriate from initial settings. There may be cases when changing to the Input/output signal assignment are required for actuator operation.

Parameter setting . 28 (1) Exclusive parameter setting for the connected actuator . 28 (2) Change of controller and actuator settings . 31 (3) Change of the parameter protect setting . 32 4.3 Step data setting . 33 (1) Step data setting . 33 (2) Saving or Loading the Step data . 35 4.4 Monitor function . 36 4.5 Teaching . 36 4.6 Test Drive . 39 (1) Test Drive . 39 (2) JOG, Inching, and Return

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

Controller Set Up . 34 9.1 Communication Speed and Controller IDs . 34 9.2 Selection of the input type . 34 9.3 Basic parameter setup . 35 9.4 Step Data Input type . 36 (1) Cycle time entry method . 36 (2) Speed entry method . 37 9.5 I/O setup . 38 9.6 Step Data setup . 39 10. Monitor and Test Mode of the Controller . 41 11.

.*(32 characters) Can be set to 16-32 characters. 0x0024(36) DeviceStatus R Refer to Section 3.3.2. 0x0025(37) DetailedDeviceStatus R Refer to Section 3.3.3. 3.3.1. SystemCommand (Index 2) The various reset commands supported by the SI Unit are as follows. Table 3-5.

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

-60 3.0 4.7 8.0 12 18 29 48 -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -12No.

Right : 2feet (0.6m) Locations where ambient temperature is Left : 2feet (0.6m) Locations where ventilation grille of the beyond following range: On-stream: 36 to 104F (2 to 40oC) equipment can be blocked. Storage: 32 to 122F (0 to 50oC) Place where rejection style air of air (when there is no drain water compressor or other driers (hot wind) is inhaled.

On-stream: 36 to 104F (2 to 40oC) Place where rejection style air of air Storage: 32 to 122F (0 to 50oC) compressor or other driers (hot wind) is inhaled. Place where rapid pressure fluctuation and fluid (when there is no drain water velocity variation happen inside of the piping) Locations where temperature changes rapidly.

Attempting to do so may damage parts. 36 Caution Fixation of DIN Rail Mounting Type Manifolds 1. When the manifold is fixed with bolts on a mounting surface etc., it can be operated just by fixing on both ends of the DIN rail if the bottom surface of the DIN rail is entirely in contact with the mounting surface when mounted horizontally.

50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55% Z 3 2-M40.7, 6 deep V 2-M30.5, 4 deep K 5 4 G Max. 3 7.5 M Stroke:S MXP12-15 Width across flats 2 Width across flats 6 A Piping port 2-M50.8 14 H (Plug:M-5P) 8 M40.7 18.2 8.5 4.2 25 24 8.5 4-M40.7 4.5 deep 4-M50.8 Bottom hole diameter 4.2 A 19 1.5 20 220.05 W 0.50.05 B D Piping port 2-M50.8

MXW12-125 137 35 32.5 330 6 76 60 127.5 182 136 MXW12-150 164 40 47.5 380 6 101 85 147 MXW Series Long Stroke Slide Table Dimensions MXW 16 Stroke: 75, 100 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 3 116 14 Scale: 30% 8 Width across flats 10 Operating port M5 x 0.8 Operation direction A 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 (Plug : M-5P) 74 36

Dimensions/Bore size: 50, 63, 80 RS1H 63 50 80 0.2 FX FZ S X Load carrying direction 4-N through 8-O recessed area L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36

optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 3

the bonnet assembly (1) is a heat resistant structure. 10 High Vacuum Angle Valve Series XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90