CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

High Purity Fluoropolymer

Model G F B H L E M M H LQ1T2A LQ1T1A 2 1/8" 10 11.5 18.5 8 4 1/2" 3/4" 3/8" 1/2" 1/4" 3/8" 1/8" 3/16" 1/4" LQ1T3B LQ1T3A LQ1T2C LQ1T2B 15 16.5 28 14 12 6 4 25 1 5 Class 6 23 36.5 17 18 9 20 LQ1T4A LQ1T4B 6 28 11 22 21 45 20 LQ1T6B LQ1T6A LQ1T5B LQ1T5A 7 29 39 26 28 14 54 3/4" 1" 8 39.5 49 18 36 36 69.5 14 Series LQ1 Dimensions Panel Mount Union: LQ1P Metric sizes Applicable tubing O.D.

Rotary Actuator

3 1 5 9 0.5 9.5 9.5 24 6 M3 14 3.6 30 37 19.8 8.5 14.5 4 9 (6) 0.036 M3 M3 0.004 0.016 0 0.043 34 20 9 18 4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42 29 10 20 4.5 1.5 7 10 0.5 20 13 36 M5 24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.

Compact Cylinder Series CQS

5 [-2.5] 5 5.5 9 10 7 6 12 14 17 19 22.5 24.5 9 9.5 13 14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5] Anti-lateral Load Type 6 5.5 9 10 19.5 21.5 25 27 7 6.5 2.5 0.5 12 16 20 25 1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

Electric Actuator

Applicable Applicable size Applicable A U1 A1 E1 L1 MM R1 NDH10 NX A U1 A1 L E1 L1 MM R1 NDH10 NX NZ pin part no. size 16 25, 32 Y-G02 16 IY-G02 l16 l16 +0.058 0 0.2 0.4 +0.058 0 +0.4 +0.2 34 8.5 25 M8 x 1.25 10.3 11.5 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 8 16 21 Y-G04 25, 32 IY-G04 +0.058 0.3 0.5 +0.058 +0.5 +0.3 42 14 22 30 M14 x 1.5 12 14 10 18 42 16 22 30 M14 x 1.5 12 14 10 18 36 41.6

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Electric Slide Tables

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

CG5-S

41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5

Air Cylinder

14 15 9 9 10 10 11 D-B59W 14 14 17 16 18 D-P3DW 4.5 5 6 5.5 6 D-P4DW 4 4 4.5 4 4.5 Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately p30% dispersion) and may change substantially depending on the ambient environment. 22 Auto Switch Mounting Series CA2 Auto Switch Mounting Brackets/Part No.

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

C85

15.5 57.5 57.5 16 14 15.5 82.5 82.5 16 14 15.5 15 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F Hs 15.5 31 46.5 16 20 25 8 10 12 8(33) 8(33) 14 12 13.5 58 58 14 12 13.5 83 83 14 12 13.5 D-H7 D-H7C D-H7W D-H7BAL D-H7NF (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W