ARJ310

5 q u o Material Note Parts list !

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

IDX-OM-W035

G D E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

How to Order ALD 20 B 9 00 S1 Float switch Style Nil None 1b (without oil ON) ALD ALDU D.P . Lube (Single unit) D.P .

NAIV

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

ZSE20(F)_ISE20

B Panel mount adapter Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no. Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

AS-FPQ/AS-FPG

Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Pressure valve/Series ASR Flow valve/Series ASQ

Operating Principles 3 Quick exhaust Parts in section B provide q uick supply of pressure when the piston reaches the end of stroke Parts in section C provide low pressure on the return stroke of the piston Section B Parts in section B provide q uick exhaust of supply pressure on the return stroke to shorten the delay time Flow valve/ASQ Model Model Applicable tube O.D.

IDX-OM-W011

C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51 232 138 24 327 IDF4E / IDF6E / IDF8E / IDF11E ( 10 :0.8m) [ AC100V ] [ AC200V ] (:1.9m) [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF4E Rc1/2 453 13 498 568 31 42 283 355 80 230 32 15 284 15 240 80 275 IDF6E Rc3/4 455 270 485 IDF8E

Air Suction Filter With One-touch Fittings Series ZFB 1

Length per roll (m) Tubing material Symbol T Material Nylon Symbol TI Material Nylon Symbol 20 20 m (Standard) Length Metric size Inch size TS Soft nylon TU Polyurethane TIS Soft nylon TIU Polyurethane Color Symbol B Color Black Symbol B Color Black Nylon Inch size Tubing size Soft nylon W White BU Blue W White Metric size Size Size R Red Symbol Symbol 0425 O.D. 4 6 8 8 10 10 A05 Size O.D

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

How to Order 100 04 B ZFC With bracket (Standard) Air suction filter in-line type with One-touch fittings IN/OUT applicable tubing O.D.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Valve Replacement Parts: Pilot Valve

Replacement pilot valve for the JSY3000/5000 b-side pilot valve 2 Pilot valve mounting screw (M2 x 16.5) Tightening torque: 0.15 Nm B tight flat head screw (M1.7) Tightening torque: 0.12 Nm 2 Pilot valve mounting screw (M2 x 25) Tightening torque: 0.15 Nm Loosen B tight at head screw to remove the pilot cover in the direction indicated by the arrow q.

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Air Catch Sensor

Caution q Supply air Be careful not to allow any foreign materials into the supply of the Air Catch Sensor. Contamination of the sensor will decrease the sensors accuracy. Especially important when measuring small bore orifices. Use dry and filtered (5m) supply air. wOperating pressure Do not exceed the max. operating pressure of 0.2 MPa.

Electro-Pneumatic Proportional Valve Series VEF/VEP

flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) 888 Series VEF/VEP Electro-Pneumatic Proportional Valve Pressure Type: VEP Diagram of Working Principle Flow Characteristics Current-Pressure Characteristics The horizontal axis of the characteristics represents the output amperage of the power