Solenoid Valve

No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42 No.SQ1000V-OMQ0002-B 43 No.SQ1000V-OMQ0002-B 44 No.SQ1000V-OMQ0002-B 45 No.SQ1000V-OMQ0002-B 46 No.SQ1000V-OMQ0002-B 47 No.SQ1000V-OMQ0002-B 48 No.SQ1000V-OMQ0002-B 49 No.SQ1000V-OMQ0002-B 50 No.SQ1000V-OMQ0002-B 51

Electric Actuator Miniature Rod Type Miniature Slide table Type

(At stop(EMG) or SVRE[OFF]) 51 - Revision history No. LEP-OM00201 Oct / 2011 1st printing. No.LEP-OM00202 Apr / 2012 Revision Addition / Note about UL recognition.

Regulator Valve

Example: VEX1300-03 240 VAC 240V VK300-82-2-07 G36-4-01 6 VDC 6V VK300-82-4-51 12 VDC 12V VK300-82-4-06 Sub-plate and gasket part no. 24 VDC 24VDC VK300-82-3-05 48 VDC 48VDC VK300-82-3-53 Body size 2 Circuit with indicator light 12 VDC or less 24 VDC or more AC circuit Sub-plate circuit diagram circuit diagram diagram Base gasket VEX1-11-2 How to Wire DIN Terminal (VEX1101, 1201, 1301) D

High Vacuum L Type Valve

control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51

11-cu-e

.: GR-S-010 (10 g) 51 Free Mount Cylinder/Single Acting, Single Rod, Spring Return Series CU 10, 16, 20, 25, 32 Construction With auto switch Single acting, spring return Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 10 !8 !9 !8 !9 16 to 32 !8 !

Title not found

(800) 526-7661 3/8 Male Pipe Thread to Tube 3/8 Male Pipe Thread to Tube 11/16 Hex Typ. 3/16 29/32 1 11/32 13/16 17/32 29/32 11/16 11/16 51 3/8 B2 1/2 3/8 B2 3/8 B4 3/8 B6 3/8 B3 3/8 B8 3/8 Male Pipe Straight Manifolds #1 Barb P/N 3/8B1 x 2 3/8B1 x 3 3/8B1 x 4 3/8B1 x 5 3/8B1 x 6 3/8B1 x 7 #2 Barb P/N 3/8 B2 x 2 3/8 B2 x 3 3/8 B2 x 4 3/8 B2 x 5 3/8 B2 x 6 3/8 B2 x 7 #5 Barb

Series 10-MGF Guide table ø40, ø63, ø100

Maximum tightening torque Nm L(mm) Model Bolt M6 x 1 MGF40 10 7.5 M8 x 1.25 MGF63 25 9 M10 x 1.5 MGF100 51 9 Mounting from bottom side 4. Do not bring objects that are sensitive to magnetism near the cylinder. The magnet is built into the cylinder. Do not bring magnetic disks, cards or tapes near the cylinder. Data may be lost. 5.

Cylinder with Turntable Series MGT

77 96.5 116 16.5 19 23 M6 x 1.0 M8 x 1.25 M10 x 1.5 22 26 32 58 54 62 39 46 56 8.6 10.6 12.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 25, 50, 75, 100, 125, 150, 175, 200 121.5 145 111.5 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB Nil TN TF NPT 1/4 117 128 168 58 74 89 54 56 71 100 125 150 24 24 35 188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51

10

18H9 0 depth 1.5 4 M5 x 0.8 (Finger opening port) 4 x M5 x 0.8 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 44 18.2 5.5 0.5 9 12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31 20 K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51

3

With arm Port side M Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) 14 With Arm (mm) 10 mm Clamp stroke M 51 35 Model Rod state 20 mm 30 mm Retracted Extended Retracted Extended 32 51.5 32 51.5 42 71.5 42 71.5 52 91.5 52 91.5 MKB20-Z 7 12 to 22 M6 x 1.0 MKB25-Z 16 During clamping (Retraction end) Head flange Rod flange The dimensions

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51

240

and pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101 60 OUT 201 16 6 121 86 51

Clean Gas Filter

Fluid: Compressed air Inlet temperature: 20C Dimensions SFA100/101, SFA200/201, SFA300/301 SFA10 Inlet pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51

CE

7.5 counter bore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 38 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12 Stroke 4 (Positioning pin hole) 40 5.5 13 25 6 +0.05 +0.02 66 54 47.5 17 40 27 3.5 51

Copper-free Actuators

15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Mechanical joint rodless cylinder Series MY1 3.23-7 20-MY1B Basic SMY1Bl 3.23-23 20MY1M SMY1Ml Slide bearing guide SMY1Cl 3.23-37 20-MY1C Cam follower guide 3.23-51

Series CQ2

Lead wire length 3m (~9ft) Model 51 (1.8) D-Y7BAL Internal circuits D-Y7BAL/2 wire Dimensions (mm) 1in = 25.4mm D-Y7BAL OUT (+) Brown [Red] Main switch circuit 33 3000 2 2.5 OUT () Blue [Black] Indicator light Indicator light/Display method Mounting screw M2.5 x 4 l Slotted-head set screw ON Operating range OFF 0.4 10.6 5 3.4 Red Indicator Green Red Optimum operating position 6.2 l Operating

2–4

Auto Switch Weight Auto switch internal circuits Unit: g D-F9NV D-F9NV D-F9PV D-F9BV Model DC (+) Brown [Red] 0.5 7 7 6 Lead wire length (m) 3 37 37 31 Switch main circuit Switch main circuit Switch main circuit OUT Black [White] 5 61 61 51 DC (-) Blue [Black] Auto Switch Dimensions Unit: mm D-F9V D-F9PV Mounting screw M2.5 x 4 Slotted set screw 4.3 DC (+) Brown [Red] Indicator light 2 OUT

CU

DC(+) Brown [Red] 7 7 6 0.5 Lead wire length (m) 37 37 31 3 Main circuit of switch OUT Black [White] 61 61 51 5 DC() Blue [Black] Dimensions D-F9 D-F9P(V) M2.5 x 4 Slotted set screw DC(+) Brown [Red] 2 Indicator light Main circuit of switch 22 2.7 2.8 OUT Black [White] 2.6 4 DC() Blue [Black] Most sensitive position 6 D-F9B(V) OUT(+) Brown [Red] D-F9V M2.5 x 4 Slotted set screw 4.3 Main circuit

Compact Type

Weight Unit: g Auto Switch Internal Circuit D-F9N (V) D-F9P (V) D-F9B (V) Auto switch model D-F9N, F9NV 0.5 7 7 6 Lead wire length m 3 37 37 31 DC (+) Brown 5 61 61 51 Switch main circuit Switch main circuit Switch main circuit OUT Black D-F9 Dimensions Mounting screw M2.5 x 4 L Slotted set screw DC () Blue 2 Indicator light D-F9P, F9PV DC (+) Brown 2.7 2.8 22 2.6 4 OUT Black Most sensitive