VQ5000

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Step Motor Controller

(N.C.) 21 Series LECP6 Series LECA6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing In this setting, the actuator moves toward and stops at the target position. The following diagram shows the setting items and operation. The setting items and set values for this operation are stated below.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

50 48.4 43.5 41.9 16.6 VCHC ASR ASQ 13.3 40 AS33l1FG-G03-08A 8 13.2 38.0 23.5 52.2 14.2 41 AS33l1FG-G03-10A 10 15.9 17.4 23 42.2 26.1 50.3 15.6 44 AS33l1FG-G03-12A 12 18.5 43.5 28.3 52.2 17 46 AS43l1FG-G04-10A 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 50.8 49.2 41.8 40.2 15.6 75 AS43l1FG-G04-12A 12 18.5 21 26.2 49.8 28.3 63.4 17 79 10.4 12.9 20.2 36.6 21.4 50.1 3/8 21 16.6 42.3 40.7 34.8

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

MU

For details, refer to page 7-9-36. 7-8-21

EXxx-OMN0035CN

15 22 24 V() 23 24 V() 24 0 V() 25 FE EX600-DXPE EX600-DXNE 102223 24 V 102223 24 V 1~814~21 1~814~21 DC24 V 4.7 k 4.7 k DC24 V 111224 0 V 111224 0 V FE 1325 FE FE -22No.EX-OMN0035CN-A (4)EX600-DXF 1 24 V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 24 V() X4 2 8 4 3 9 4 0 V() X4 1 24 V(X5 2 10 5

VQ4000

38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External pilot port 19.5 (21) 19.5 (21) Rc1/8 PE port Rc1/8 PE port 19.5 (21) 19.5 (21) 31 31 5

Series AS-FM/AS-M/ASD-FM

16 17 18.5 19 21 32 33 36 39 40 37.2 41.7 40.1 42.6 45.6 48.4 47 12.9 16.2 10.9 16.2 35.4 40.4 NPT1/4 17.5 18.5 29.4 34.4 18.3 12.9 21 20.2 Reference dimensions for 10-32UNF and NPT threads after installation. 5 Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body) Specifications AS220M-02 AS220M-01 Model AS120M Cylinder side R1/4 M5 x 0.8 10-32UNF NPT1/8 NPT1

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 15-18-21

HRX-OM-X071

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36 20 21 Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-60 5 Speed Controller for Low Speed Operation With One-touch Fitting, Elbow Type/Universal Type

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

12 15 22 15.5 18 50 21.5 11 13 15 17.5 22.5 24.5 11.5 13.5 16.5 23.5 17 19.5 14.5 63 24 13.5 14.5 17.5 20 25 26 25 18.5 21 80 14 17 24 13.5 16.5 17.5 20 25 28 17 20 27 20.5 23 100 17.5 20.5 27.5 17 21 21 23.5 28.5 32.5 21.5 24.5 31.5 25 27.5 Auto switch mounting heights (mm) Auto switch types D-F5, D-J5 D-F5W, D-J59W D-F5BA, D-F5F D-F5NT D-A3 D-G39 D-K39 D-A5, D-A6 D-A59W D-B5 D-B6 D-A44

Rotary One-touch Fittings Manifold Series KM

D1 D2 L1 L2 L3 P Q1 Q2 M1 M2 6 KM13-04-06-3 10.4 18 19 20 21 22.5 13 15.5 15.5 19 19 60 63.5 70.5 74.5 81.5 12.8 9.9 11.1 11.1 12.8 12.8 13 16 18 23 27 17 18.5 18.5 21 21 4.5 6 6 7.5 7.5 4 10.4 16 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 6 12.8 17 45.4 10 10 8 15.2 18.5 52.6 KM14/Dimensions Applicable tube O.D.(mm) Part No. D1 H (Hex.)

Sine Cylinder Series REC

Graph (1) Absorbed Energy Curve Mounting style Applicable max. stroke according to buckling strength 100 90 80 70 60 50 40 REC40 Operating pressure (MPa) REC32 Mounting bracket symbol and figure Symbol REC REC25 30 Load mass M (kg) 20 25 32 40 REC20 20 Rod side flange style: F Head side flange style: G 39 50 56 61 0.3 Foot style: L L 10 30 38 43 47 0.5 W W W F 5 24 31 36 39 0.7 11 17 19 21