Process Pump <Fluororesin Type> Series PA3000

[ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view

AC Servo Motor Driver (CC-Link Type)

Approx. 5.6k Switch DICOM 24VDC 10% 150mA Approx. 5mA VCES 1.0V ICEO 100 A (2) Digital output interface DO-1 A maximum of 2.6V voltage drop occurs in the driver. If polarity of diode is reversed, servo amplifier will fail. Servo amplifier Driver driver ALM, etc. Load DOCOM (Note) 24VDC 10% 150mA Note.

%silltr

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

Power Valve: Economy Valve Series VEX5

10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Series CE1

pulse) REA Power supply voltage 100V AC ( 20%), 50/60Hz 24V DC ( 10%) (Power ripple 10% or less) Between case and AC line: 1500V AC for 1min.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.

VK3000

to 50C (No freezing) 10 ms or less (Standard), 15 ms or less (Low wattage type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.