SI unit for EtherCAT

Element Description EtherCAT connection. 1 (M12 4-pin socket, D-coded) 1 Fieldbus interface connector (BUS OUT) EtherCAT connection. 1 (M12 4-pin socket, D-coded) 2 Fieldbus interface connector (BUS IN) 3 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit. 1 (M12 5-pin plug, A-coded) 4 FE terminal Functional earth.

SI unit for PROFINET

Element Description PROFINET connection PORT 2. 1 1 Fieldbus interface connector (BUS OUT/Port2) (M12 4-pin socket, D-coded) PROFINET connection PORT 1. 1 2 Fieldbus interface connector (BUS IN/Port1) (M12 4-pin socket, D-coded) 3 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit. 1 (M12 5-pin plug, A-coded) 4 FE terminal Functional earth.

DOC1013639

Caution (1) Install an air filter. Install an air filter upstream near the valve. For the filtration rating, select 5 m or below, or select a rating equivalent to or lower than ISO 8573-1:2010 [6:4:4]*.

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

RQ

For detailed specifications, refer to page 7-9-1.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

For Water Digital Flow Switch Series PFW

35.8 A Load Load 40 UNIT 12 to 24VDC + RESET SET PFW30(-M) Panel fitting dimensions 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 Sensor 1 2 3 4 Blue Brown Black N.C. 1 2 3 4 +0.5 0 19.4 36 5 6 7 8 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + The applicable panel thickness is 1 to 3.2mm.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

High Pressure Coolant Valve

to 60C Note 1)/5 to 60C Note 1) (NBR seal) 5 to 60C Note 1)/5 to 99C Note 1) (FKM seal) VNH A VNH B 1 3 1 3 Pressure Temperature Lubrication 5 to 50C Note 1) 0.25 to 0.7 MPa Pilot air Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

Process Pump

When compressed air with an atmospheric dew point below -40oC is used for the operating environment or as supply air, testing under users operating conditions is recommended. 5. Operating environment Warning 1.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

Process Pump

PAB-OM-H007-D PRODUCT NAME Process Pump MODEL / Series / Product Number PAF3410 Contents Safety Instructions P.2 to 3 1. Precautions for handling P.4 2. Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P.5 to 6 5. Maintenance and check -P.6 6. Specification and how to order P.7 to 8 7. Discharge capability -P.9 to 10 8.

Series KJ One-touch Mini

Air, Water Note 1) Fluid 1 MPa Maximum operating pressure 100 kPa Operating vacuum pressure 3 MPa Proof pressure 5 to 60C, For water: 0 to 40C (No freezing) Ambient and fluid temperature Brass parts are all electroless nickle plated. Copper-free (Standard) Note 1) Applicable for general industrial water.

Pressure Switch/Reed Switch Type

Description Material Body 1 ZDC 0.1 0.3 i w Switch assembly 2 0.2 0.4 Shield plate 3 Steel sheet o Cover 4 Steel sheet MPa 52 !0 Adjusting screw 5 Brass Hexagon nut 6 Brass !1 Indicator 7 PBT Spring 8 Stainless steel !2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1.

DOC1023894

Part name Material Qty Remarks 1 Cassette POM,Stainless steel304 2 Blue 2 Body PBT 1 Red 3 Seal NBR 2 4 Valve HNBR 1 5 Valve guide Brass 1 6 Rod Brass 1 7 Push Button POM 1 Red 8 Spring Stainless steel304-WPB 1 9 Push nut Stainless steel304 1 Rc thread with a push button guardKEC No.