5 W (With indicator light) Power consumption Note) N.C.
M2 bolt circle M1 W I dia.
sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Rubber Rubber w/ sp.controller VQZ2150lC 200 40 15 or less 20 or less VQZ2151lC Single 2 Position 3 Position 44 15 or less 20 or less VQZ2151SlC 0.7MPa Flow rate (l/min (ANR)) 10 or less 13 or less VQZ2250lC 54 15 or less 20 or less VQZ2251lC SY Double 0.5MPa 58 15
4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.
Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code
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S After setting needtes. remount the cover. Insert the cover nail into hole of case (\l mark), set the mark( DO ) of the cover to the case and rotate the cover ctockwise until it stops.
6 w !0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.
Hydraulic fluid Compatibility Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible JIS symbol O/W hydraulic fluid Compatible Not compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Contact P/A.
W Z E Please inquire separately regarding applicable voltage.
(AC24V) Bdy potted vKF300.11A.1 (With bracket) M5) (Manifold only) ,_Without subplate 01T 1/s NPTF subplate Indicator light / Surge voltage suppressor 'S With surge voltage supprdssor 7 With indicalor light and surge voltage suppressor (D type only) " Special order * Z oplion is not available wilh grommel. ' Special ofcler Construction / Parts List Symbol . .rf--rF t / V \ I ] \ N L I T I
CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.
For manual workpiece setting processes Manually operated handle (Unclamping position) CKZT32 16-E682 CKZT -X2797 (Base Type) -X2798 (With Manually Operated Handle) Power Clamp Cylinder T Z K C -X2797 -X2798 Compact Type 25, 32 How to Order CKZT X2797 S 25 105 Base type X2798 CKZT S 25 105 L With manually operated handle Bore size Manually operated handle mounting position L (Left side mounting
When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.
56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59
accuracy Positioning repeatability LJ1H High rigidity direct acting guide + Rolled ball screw Slide screw 0.1mm Rolled ball screw 0.05mm Ground ball screw 0.02mm LJ1H High rigidity direct acting guide + Slide screw LJ1S Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W
accuracy Positioning repeatability LJ1H High rigidity direct acting guide + Rolled ball screw Slide screw 0.1mm Rolled ball screw 0.05mm Ground ball screw 0.02mm LJ1H High rigidity direct acting guide + Slide screw LJ1S Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W
Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58
Mount switches in locations without vibration (98m/s or less) or impact (490m/s or less). 3. Do not use in an area where surges are generated. When there are units (solenoid type lifters, high frequency induction furnaces, motors, etc.) which generate a large amount of surge in the area around switches, this may cause deterioration or damage to the switch.