3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.
MHF2-16D1 MHF2-16D2 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602 MHF-A1602-1 MHF-A1602-2 Finger assembly Kit no. Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly e, r, t, y, !4, !6, !
MHF2-16D2 MHF2-16D1 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !
1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !
t q MHZ MHF MHL MHR w r u e MHK Component Parts No.
3 Hard anodized Aluminium alloy NBR Cap Rod seal t !4 Stainless steel NBR Clip Piston seal y !5 Urethane rubber NBR Bumper Gasket u !6 Brass NBR Electroless nickel plated Holder Gasket i !7 Stainless steel Holder lock o Replacement Parts Description Kit no. Note Main parts !4, !5, !6, !
TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.
Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.
Construction IN w o e y EXH EXH t q r OUT SUP u i Component Parts Replacement Parts No. Description Material Note 1 Valve Aluminum alloy Silver baking finish Model Order no.
Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.
Rod side cylinder port Rc, NPT, G 1/8 Rear cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Rear cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.
6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.
Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.
Field wireable connector t Y connector M12 D M9N PCA-1557798 Two auto switches with M8 connectors can be connected.
1 Cover Resin e Return guide Resin r Scraper Stainless steel, NBR t Electroless nickel plated Piston Brass y Electroless nickel plated Joint shaft Carbon steel u Electroless nickel plated End cap Brass i Rod bumper Polyurethane o Steel balls High carbon chrome bearing steel !0 Electroless nickel plated Plug Brass, PVC !1 O-ring NBR !2 !0 r e t Piston seal NBR !
1wo e t i y u !4 !5 !2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Gasket Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring No.
Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -
Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -
Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]
Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)