Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Actuator Position Sensor

Be sure to confirm safety when returning operation of the cylinder and actuator because it could have been stopped in an unstable condition. -28No.D-S-OMU0002-A Specifications Model D-MP025 D-MP050 D-MP100 D-MP200 Measuring range 25 mm1 mm 50 mm1 mm 100 mm1 mm 200 mm1 mm Power supply voltage 15 to 30 VDC, ripple (p-p) 10% or below (with power supply polarity protection) Current consumption

VXZ

8.5 11 23 38 10 VXZ2230-02 VXZ2230-03 VXZ2240-04 VXZ2350-06 1.9 2.4 5.3 9.2 46 58 130 220 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.5 10 15 20 0 VC Effective area Air Flow characteristics AC DC AC DC AC Water Air Max. operating pressure differential (MPa) Oil DC VXZ2360-10 25 1.0 0.7 1.0 0.7 0.7 0.7 290 12 215 1.5 1480 0 1 Min. operating

VCW

) 10 is available only for N.C.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

20 1 5 30 25 25 2.

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

Heavy Duty Stopper Cylinder Series RSH/RS1H

10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10 12.5 Stroke

Air Fittings Fitting Series For Special Environment

N L1 L2 Port B min. port size L3 L4 L5 L6 D P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 80 10 6 6 10 40 47 23.3 13 19.5 33.5 23.5 33 13.5 19 22 8.5 10 106 6 89 10 120 55 73 53 55 KRM11-08-12-10 KRM11-08-12-6 8 12 25.7 15.5 22.5 37.5 26 36.5 20.5 24 10 11.5 14.7 86 74 KRM12 Weight (g) Applicable tube O.D.(mm) Thread Rc(PT) H (Hex.) Port B min. port size Part No.

XL-OMV0005

Refer to Chapter 3 3-2. and 3-3 Step 3 (P9, 10). Air facility for valve drive For opening and closing the valve. Table 6. Bolt and Nut size Valve size Bolt size Nut size 16 M4 M4 25 M5 M5 40 M6 M6 50 M8 M8 63 M10 80 M10 6 XL-OMV0005 2-4.

ASR

66.8 29.7 30 74.3 R3/8 25 30.7 107.9 86.9 67.6 60.1 28 61.2 53.7 20.8 294 312 22 34.4 76.6 12 20.9 312 330 21 32.6 74.8 10 18.5 30.8 66.8 29.7 30 74.3 R1/2 25 30.7 111.4 90.4 71.1 63.6 28 62.9 55.4 24.1 314 332 22 34.4 76.6 12 20.9 Note 1) d indicates the applicable tubing O.D..

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

3 Position Cylinder Series RZQ

Full stroke 5 10 10 15 15 15 20 20 15 2 pcs.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

1P 5EA 96.5 27 25 11.8 1/8" (Pilot EXH. port) 153.4 76.5 L (Lead wire length) 1.55 0.3 mm2 80.5 (For E type) 34 17.5 29.5 29.5 5 x 3/8", 1/2" (Piping ports) 44.5 L plug connector with cover (LL) 52-SY9140 (R) -LL03 04 L 148.3 (Lead wire length) Insulation: Red Insulation: Black 0.3 mm2 4.1 51.2 48.5 Cable type (TT) 52-SY9140 (R) -TT03 04 Max.10 L 165.1 (Lead wire

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

Step Motor Controller (Servo / 24 VDC)

Product Outline . 6 2.1 Product features . 6 2.2 Product configuration . 7 2.3 How to Order . 8 2.4 Option . 9 (1) Actuator cable (5m or less) . 9 (2) Actuator cable (8-20m) . 9 (3) Actuator cable for with lock and sensor (5m or less) . 10 (4) Actuator cable for with lock and sensor (8-20m) . 10 (5) I/O Cable . 11 (6) Controller setting kit . 11 (7) Teaching box . 12 2.5 Startup Procedures

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.