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MPa ZSE20A [P_1] OUT1 -50.5 kPa [P_2] OUT2 -50.5 kPa [H_1] OUT1 5.1 kPa [H_2] OUT2 5.1 kPa ZSE20AF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa 1 -23No.PS-OMU0002CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 61)) -24No.PS-OMU0002CN-D (P1LP1H) 24P1L()P1H()WH1() (n1Ln1H) 33 OUT2 [F 1]OUT1[F 2]OUT2// -25No.PS-OMU0002CN-D <> () () 13

ZSE20CF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa ISE20CH [P_1] OUT1 1.000 MPa [P_2] OUT2 1.000 MPa [H_1] OUT1 0.100 MPa [H_2] OUT2 0.100 MPa 1 -25No.PS-OMU0008CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 63)) -26No.PS-OMU0008CN-D (P1LP1H) 26P1L()P1H()WH1() (n1Ln1H) 35 OUT2 [F 1]OUT1[F 2]OUT2// -27No.PS-OMU0008CN-D <> () () 13

. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 NPN2 PNP2 9 OUT2 10 OUT2 11 12 13 14 15 16 2 -38No.PS-OML0002CN-G [F97]

(A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 -33No.PS-OMM0002CN-F [F 9] 30 () <> [F 9] [Eco] [F9] 30 (ON ) ON -34No.PS-OMM0002CN-F [F10] <> [F10] [Pin] [F10] 000 40 -35No.PS-OMM0002CN-F [F98] <> [F98] [ALL] [on] 1 [oFF] [oFF] 2 [F98] 1 37 -36No.PS-OMM0002CN-F 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 -R-S-T-V 13

Caution 13 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 5 Be sure to read this before handling.

Assy M8 Ass'y M8IP65() Ass'yV100-49-1NECA4202 IEC60947-5-2 FA M8 SY100-68-A3PIN SYJ300, 10.5mm 10.5mm 0.40.6Nm IP65 30N 300mm 6 600mm 10 1000mm IP65 V100-49-1 15 1500mm 20 2000mm 25 2500mm 30 3000mm 50 5000mm Assy Ass M8 1300mm y <1> 2000mm W1WA1300mm SYJ312-5LOZ-M3 SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13

(PNP NPN) SI PWR LED DC24 V10% (PNP NPN) 13 SI PWR(V)_LED DC24 V+10/-5 PLC -41No.EX-OMN0029CN-D No. SI PWR_LED DC24 V10% SI PWR(V)_LED DC24 V+10/-5 14 PLC -42No.EX-OMN0029CN-D EX600 /PLC H.T.PLC H.T. H.T.PLC H.T. PLC PLC PLC H.T. No. (H.T.) H.T. EDS SI OFF/ SI Switch Hold/Clear (Hold/Clear) 1 TM EDS DeviceNet H.T.

NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13

, or FB values) SHMITT TRIGGER 19 Turn an Input On at the High Value and Off at the Low Value (or vice versa) Hour Meter 19 Records the accumulated time a signal has been ON System Outputs 10 Controls External Devices through Relays and Transistors. 1*) No. of bytes used = 19 + 1 x (Characters in Equation) 2*) No. of bytes used = 8 + 4 x (Number of time switches) 3*) No. of bytes used = 13

1 Urethane resin Urethane resin NBR NBR 14-13-4 3 Large Flow Type Lubricator Series AL800/900 Option Dimensions Metal bowl AL800/900 Port size F.R.L.

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Dimensions 220 30 25.5 3000 Lead wire length Left end adjustment limit Right end adjustment limit AIRCHECKER PS1000-R06L + 13 10 PRESS. 0.10 to 45 MPa {1 to 4.6 kgf/cm2} MADE IN JAPAN Internal Circuit/Wiring Calibration trimmer Lead wire colors inside ( ) are those prior to conformity to IEC standards.

Option) Note) Single mounting type: M5 x 0.8 female threaded. 23 NPN open collector 1 output Failure predict function without analog output 24 NPN open collector 1 output Failure predict function with analog output (1 to 5 V) Caution Refer to pages 16-14-3 and 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13

115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 13

state) VN LVC LVA Characteristic Specifications LVH Max. operating pressure (MPa) LVD (1) (1) Max. operating pressure differential (MPa) Flow characteristics Port size Orifice size (mm) Weight (kg) Class Model LVQ Av x 10-6(m2) Cv converted 0.16 2 2.0 3.8 LQ 0.33 3 0.8 7.9 1/8 (6A) 1/4 (8A) 3.0 1/8 : 0.21 1/4 : 0.24 2 VCB2 0.51 4 0.5 12 LVN 0.65 5 0.3 16 0.35 3 2.0 8.4 TI/ TIL 0.54 4 0.8 13

the initial state) VN LVC LVA LVH Characteristic Specifications LVD Max. operating pressure differential MPa (1) Orifice size (mm) Flow characteristics Weight (kg) Max. system pressure MPa LVQ (1) Class Model Port size Av x 10-6 (m2) Cv converted LQ 0.16 3.8 1.0 2 LVN 0.33 7.9 0.8 3 1/8 (6A) 1/4 (8A) 1.0 1/8: 0.21 1/4: 0.24 2 VCS2 0.51 12 0.5 4 TI/ TIL 0.65 16 0.3 5 0.35 8.4 1.0 3 PA 0.54 13

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

OUT Note 1) Refer to page 17-3-13 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.