CYPSeries

(variations on the order of 30%) Large variations may occur depending on the surrounding environment.

CYPSeries

(variations on the order of 30%) Large variations may occur depending on the surrounding environment.

VP300/500/700

Prefix it to the part nos. of the solenoid valve, etc. 4-8-12 13 3 Port Pilot Operated Poppet Solenoid Valve Rubber Seal Series VP300/500/700 Dimensions: VV3P3 (For N.C.) Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body

NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

EX500

TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 1 2 3 4 5 6 7 8 Stations Rail length L1 110.5 123 148 173 185.5 210.5 223 248 Mounting pitch L2 100 112.5 137.5 162.5 175 200 212.5 237.5 Manifold length L3 L4 82 102 122 142 162 182 202 222 12 12 12.5 12.5 13 13

H/DL/L/LL

H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 Connection thread H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1 30 22 17 17 22 51 12 19 H12-03 17 31.1 39 H12-04 34.1 Male Elbow: DL H1 (width across flats) H2 (width across flats) Connection threads R Model Applicable tubing O.D.

Pulse Valve

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

For post-stoppage positioning and locking

30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw) 11.5 4 x 13 through 4 x 11 4 x 20 counterbore depth 8 (Mounting hole) 18 (Clamp block mounting hole) 500.03 2 x 8H7 +0.015 0 14 117 45 23 35 20 140 40 10 118 82 17 15 46 200 170 20 114 436 W-R3-SPosition of fulcrum 2 x 18.5 Proximity switch mounting bracket 74 Proximity switch (Option) 158 65 2 x Rc3/8 14 12 25 220 25 140

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

PSxx-OMM0002CN

[ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "Lo" 1 1 () 10%0 (1dight ) 1 LoC1 () < -> 5 LoCUnL () / -39No.PS-OMM0002CN-F < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41/ [UnL] [FAL] 3[LoC] -40No.PS-OMM0002CN-F [000] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F

Digital Pressure Switch

[F80] Power saving mode completed In power saving mode, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode.

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

Bore Size: 6mm, Stroke: 40mm

Bore Size: 6mm, Stroke: 10mm, Adjuster: A (Adjusters Both Ends), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m [Or None in the Case of No Switch], Number: S (1 pc.)

Bore Size: 6mm, Stroke: 20mm

Bore Size: 6mm, Stroke: 50mm

Bore Size: 6mm, Stroke: 50mm, Adjuster: A (Adjusters Both Ends)