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(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

can be selected for the diaphragm material Design includes an intake/exhaust port in the diaphragm compartment which facilitates flow Valve springs are partitioned by the diaphragm Pulsation suppressing design Consistent clean room production Washed, assembled and inspected in a Class 100 environment, and sealed in double bags Step response comparison Grade A Grade B Manufacturing process

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

Male thread nozzle High efficiency nozzle 600 400 KN-R02-250 KNH-R02-200 350 Flow rate [l/min (ANR)] Flow rate [l/min (ANR)] 500 300 400 KN-R02-200 250 KNH-R02-150 200 300 KN-R02-150 150 200 KNH-R02-100 100 KN-R02-100 100 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] Low noise nozzle with male thread Copper extension

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

A B Easy manual unlocking Locked Unlocked Locking direction can be selected. Extension lock B A W Retraction lock W A B Various mounting brackets to accommodate wide range of applications.

0.31 0.26 0.27/0.33 0.29/0.41 0.35 0.42 0.36/0.34 0.29/0.30 0.29 0.23 0.18/0.23 0.19/0.18 b 0.34 0.27 0.31/0.30 0.31/0.25 0.41 0.43 0.36/0.41 0.41/0.42 0.36 0.25 0.27/0.27 0.26/0.28 b 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 b 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 VP342 (Body ported) 1/8 1

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Standard (Polycarbonate) 5 m 80 100 180 230 200 310 370 Water drop removal type (-S) 40 m 100 130 210 340 230 390 500 80 m Recommended flow rate Note 5) [L/min (ANR)] 5 m 100 140 190 250 210 350 440 Large flow type (-T) 40 m 120 180 230 380 250 480 660 80 m Weight [kg] 0.08 0.18 0.36 Note 1) The size of solid particles collectable

If using other screws, switch may be damaged. 12-13-16 17 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

If using other screws, switch may be damaged. 12-13-16 17 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 3 A / 1 1.5 *3) *3)1 1 () 4 IP8000ExdBT5 1. 1 IP8000 IP8100 420mADC()*1 23515(420mADC) 0.140.7MPa

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

The port on the piston rod B side for 10-/12-, 21is plugged since unlike the vacuum, it is not necessary to exhaust from 2 ports.