Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manual override rod A + Stroke 3-Rc FF Actuating port Actuating

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

MGC

20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (27) 21 (30) 33 (

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

/W valve for vacuum applications.

NAAMS Standards Compliant

Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

+ Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5

Air Cylinder CLA Series Fine Lock Model

MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

M2 bolt circle M1 W I dia.

Modular Type Lubricator Series AL

J H IN OUT OUT IN OUT OUT A P Min. clearance for maintenance A Min. clearance for maintenance AL10, AL20 AL30, AL40, AL40-06, AL50, AL60 Applicable model Drain cock with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B B B B Barb

One-touch Fittings Series KQ2

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

HRX-OM-R005

HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Clean Regulator/Fluororesin Type

2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

VFN2000N

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W Grommet, Grommet terminal, Conduit terminal, DIN terminal Note 1) Use dry-air at low temperature. Note 2) Use turbine oil Class1 (ISO VG32), if lubricated.