Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Hand Valve Series VH 1

+0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 5-8-13 8 Series VH Dimensions: Panel Mounted VH41-02 to 04 VH41-06 ( ): Long handle type ( ): Long handle type 2 (A) 4 (B) 4 (B) 2 (A) 25 (32) 107.5 19 102 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 4-6.6 4-6.6 88 81 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

VH Series, 4 Way Hand Valve

+0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5 65 1.5 123 105.5 25 3 (R)

Type: Straight, Material: Urethane, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~8, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 8, Inner Diameter Class: ~5, Inner Diameter d(Ø): 5, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): 20, Operating Environment: Standard, Coil Winding Length(m): 200, Applicable Tube Size

Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

E-P HYREG ® Series VY1 1

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) F.R.L.

Hand Valve Series VH

+0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

2/3 Port Solenoid Valve for Chemicals

Series LVM090 Series LVM200 Valve width: 9.5 mm Valve width: 20 mm Specifications LVM090 LVM200 LVM100 Series 0.2 MPa 0.3 MPa 0.25 MPa Max. operating pressure 1.1 mm 2 mm 1.4 mm Orifice diameter Flow characteristics (Cv factor) 0.018 0.065 0.03 LVM090 and 200 are rocker type 2/3 port valves. C For detailed dimensions, specifications, and delivery, please contact SMC.

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 200 (2"), Stroke: 200 (2")

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Z (Super Compact), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: M (Male Rod End)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Z (Super Compact), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)