SMC Corporation of America
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PDF Icon NAMUR

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

https://www.smcpneumatics.com/pdfs/vfn_x36.pdf
PDF Icon VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/zh-cn/files/VF1000-OMP0001.pdf
PDF Icon Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

https://www.smcpneumatics.com/pdfs/xgt.pdf
SYJ5220T-5LOZ-M5-Q

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ5220T-5LOZ-M5-Q
SYJ512MT-5LZ-M5-F

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ512MT-5LZ-M5-F
SYJ512T-5MOZ-M5-F

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ512T-5MOZ-M5-F
SYJ512T-5MOZ-M5

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ512T-5MOZ-M5
SYJ512T-5MOZ-M5-F-Q

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket), CE-Compliant: Q (CE-Compliant)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ512T-5MOZ-M5-F-Q
SYJ522T-5MOZ-M5-F-Q

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket), CE-Compliant: Q (CE-Compliant)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ522T-5MOZ-M5-F-Q
AC40B-04M-TV1-A

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: M (Round Type Pressure Gauge w/Color Zone), Attachment: TV (T + V), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/AC40B-04M-TV1-A
SYJ314MT-6LZ-M5

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 6 (12VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ314MT-6LZ-M5
SYJ314MT-5LZD-M5

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: M5 (Base Mounted M5X0.8)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ314MT-5LZD-M5
SYJ314RT-5MOZE-M5

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: R (External Pilot), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: M5 (Base Mounted M5X0.8)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ314RT-5MOZE-M5
SYJ314MT-5LZ-M5

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SYJ314MT-5LZ-M5
ISE20A-T-P-M5-JD

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ISE20A-T-P-M5-JD
ISE20A-T-P-M5-J

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ISE20A-T-P-M5-J
ISE20A-T-P-M5-JB

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ISE20A-T-P-M5-JB
ISE20A-T-P-M5-JDK

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: K (Operation Manual, Calibration Certificate)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ISE20A-T-P-M5-JDK
ZSE20C-T-M-02-A1

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZSE20C-T-M-02-A1
ISE20C-T-M-02-A1

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ISE20C-T-M-02-A1