CE

mm) Applicable bore size (mm) D C d D C Part No.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Series VCL

D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

39

CKZ-63A037 CKZ-63A038 CKZ-63A039 CKZ-63A040 CKZ-63A041 CKZ-63A042 NAAMS code ACA037M ACA038M ACA039M ACA040M ACA041M ACA042M 70 mm Offset-Machined 120 mm Offset-Machined A B C D A B C D E F E F H G H G I J K L M N O I J K L M N O 11 through +0.028 +0.013 8F7 through 8F7 through +0.028 +0.013 11 through 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Knuckle pin MM ND hole H10 L L l t t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Mounting dimensions of extension fitting One-touch Fittings (KQ2H/KQ2S/KQ2L/KQ2W/KJH/KJS/KJL/KJW) Auto switch model D-M9(V) D-M9W(V) D-F8 D-M9A(V) 5.9 S 10 O Width across flats 5 12 19.5 Interference between the auto switch and the fitting When mounting extension fittings, first, tighten it by hand, then give it an additional 1/4 turn with a wrench. 924 Air Gripper MHZ2 1122Dimensions L

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

COQ2BP

NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

Lightweight and Compact

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 73 Circulating Fluid Temperature Controller

IZx-OMR0035

No.: IZ-OMR0035 2) Static neutralization area (Air flow setting: 10, Discharge time from 1000 V to 100 V) IZF21 IZF31 300 mm 300 mm 3) Static neutralization area (Air flow setting: 1, Discharge time from 1000 V to 100 V) IZF21 IZF31 5-2.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

V 2-wire 24 V 200 V or less None C73C C80C Yes Connector 24 V or less IC circuit None Diagnostic indication (2-color indication) (B59W) B59W Grommet Yes Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

33

For installation indoors, ventilation ports and a ventilation fan should be equipped as needed. 300 mm or more 500 mm or more 100 mm or more Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Power supply 100 V type Power supply 200/230 V type Less than 1000 m 35 40 1.00 Less than 1500 m 34 38 0.85 Less than 2000 m 33 36 0.80 Less than 2500 m 32 34 0.75 Less

AC Servo Motor Driver (Pulse input type/Positioning type)

300ms) c) Deceleration time constant (300ms) b) Acceleration time constant (200ms) a) Servo motor speed (1000r/min) a) Servo motor speed (1000r/min) Forward rotation 0r/min Servo motor speed d) Absolute move command (1000 10STM m) f) Absolute move command (2000 10STM m) e) Dwell command time (100ms) 91 - 8.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.