Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

ZP

P Applicable tubing O.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 2.1 Specifications on p.9 /See 3.1 Specifications on p.12 Use within specification range. 3) Load/resistance more than /See 2.1 Specifications on p.9 specified range is being applied /See 3.1 Specifications on p.12 to the actuator.

CRBB-OM00004

, S9P(V), 97/93A, 90/90A No.

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

For vacuum/ compound pressure ISA2 ZSE30A 01 N M Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

High Power Cylinder Series RHC

Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 11 P.12 to P.15 P.1, 2 P.3, 4 P.5 to 9 P.5 to 9 Adsorption is possible even on a slanted surface.

SRP

P-80 (YG)

SRP

P-80 (YG)

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

HRX-OM-Y120

fluid discharge temperature 0C to 100C: 0 to 10.0 V 2 CH1 circulating fluid electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V Analog (2) Analog output signal 2 Output 2 CH2 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V 1 CH2 circulating fluid electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V 1 By default. 2 For option D1 CH1 Electric conductivity control,

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

HRX-OM-K003

Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.09: Eliminate the error cause.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103

KQ2

Size 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Symbol Accessory TW 01 03 05 07 09 11 13 Name Nipple Reducer nipple Tube cap Plug U KQ2N KQ2C KQ2P 34