High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

SJ3A6

F1 Release pressure side filter y t r q e u w !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

13

Calculation Pad W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting W = P x S x 0.1 x 1 t This type of application should basically be avoided.

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Conduit terminal w/ indicator light For obtaining the flow rate, refer to page 4-1-6.

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Compact

A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable bore size 12 16 20 25 D-M9m(V)/M9mW

Gun Type Ionizer

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

20

1 u r e q w Material Description No. Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT o t POM Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12m PBT Stainless steel Stainless steel PBT !4 Stainless steel HNBR PBT !5 !0 Only for the VMG11m Combined with the elbow u. !

Micro Mist Separator Series AFD20/30/40

N.O. q r w Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location. The difference between internal and external pressure inside the element should be kept within 0.1 MPa, as exceeding this value could cause damage. e Selection Drain Caution 1. Do not allow air flow that exceeds the rated flow.

Mist Separator Series AFM20/30/40

Description Material AFM40 AFM40-06 AFM20 AFM30 Element assembly Bowl O-ring Bowl assembly (1) NBR PC AFM20P-060AS C2SFP-260S C2SF AFM30P-060AS C3SFP-260S C3SF (2) AFM40P-060AS C4SFP-260S C4SF (2) AFM40P-060AS C4SFP-260S C4SF (2) w e r Note 1) Including O-Ring. Please contact SMC regarding the bowl assembly supply for PSI and F unit specifications.

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .