ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 (Opposite side, same location) Q H 2 x J through CRBU2 1.5 JA depth of counterbore JB (Opposite side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external

0.4

Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2 x G 3/4 Step 3. Mounting the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

Angle Seat Valve /

It is calculated using the following formula. r Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

New

Av = Q .(8) $P Av : Flow coefficient [m2] Q : Flow rate [m3/s] $P : Pressure differential [Pa] : Fluid density [kg/m3] (3) Formula for flow rate Described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

E-P HYREG

(VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 2 x 4.5 Mounting hole VEXA-18-2A Bracket (Option) Hexagon socket head cap screw M3 L = 8 (2 pcs.)

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external stopper: CRJU Note 2) For the 180 specification, the slated line area do not exist.

CRJ

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

Ozone Resistant

1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,

2 Phase Stepper Motor/Without Motor Brake Series LXS

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

Compact Vacuum Ejector Series ZQ

type ZQ11U-K113.1 17.6 23 32 4-3.5 Mounting hole Lead wire length (approx. 0.3 m) (49.5) Release flow adjusting screw With L type plug connector 33 25 Suction filter Vacuum pressure switch Bracket A (standard) Supply valve Release valve 62.8 Pilot exhaust port (PE port) Note 4) 2-3.2 through Body mounting hole Note 2) S R U N L H L H k Pa MODE S ET HYS Air supply port (P port) Note 4) (M3

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

ZQ

Circuit ZQ11U-K2D F DK With L type plug connector Type J2 ZQ11U-J2Supply valve Suction filter Bracket A (standard) 2-3.2 through Pilot exhaust port (PE port) Note 4) Body mounting hole Note 2) Air supply port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The

Type: 41 (Feedback Sensor Type), Bar Length: 580mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: Z (10m), One-Touch Fitting: ø8, Bracket: B (Bracket), Sensor: F (Feedback Sensor for Type 41)

Type: 41 (Feedback Sensor Type), Bar Length: 1720mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: 3m, One-Touch Fitting: ø10, Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge Drop Prevention

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5 x 0.8 13.2 6 19 17 31 23.9 13.4 15.2 R 1/8 8 21 18.5 32.4 36.4 31.4 33.3 28.3 25.3 12 10 14.2 18.5 10 23 21 39.2 15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.