Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

9 10 12 15 BA 54 62 74 92 112 BB CA 9.5 10.5 11.5 13 14 K 9 9 10 11 12 NB Model +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D 6 7 9 11 12 54.5 2H9 3H9 4H9 6H9 8H9 8h9 8h9 MRHQ 62.5 74.5 10h9 MA 92.5 12h9 112.5 14h9 DWA SA 4.2 4.2 5.1 6.6 6.6 R 44 52 63 78 98 ZC 9 9 10 12 15 SB 8 8 9.5 11 11 ZB 7.4

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

CLQ

For details, refer to page 9-15-1.

Table of Contents

9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

NCM

Note 9) Stainless steel rod standard on 7/16", 9/16", 3/4" and 7/8". Note 10) Exclude 7/16" and 9/16". Note 11) Exclude 2".

Fieldbus System

Nil Internal pilot Internal pilot, Built-in silencer External pilot External pilot, Built-in silencer Nil None 1 station S Note) R RS Note) 1 9 9 stations Note) When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Aluminum High Vacuum Angle Valve

1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A 9.

KQ2

1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni thread installation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

DD 11-9-19 20 Series MSQ Construction #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MSQ R (With internal shock absorber) @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

HRX-OM-Y098

8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Sample DoC. . 8-14 8.9 Daily Check Sheetheck Sheet . 8-16 Chapter 9 Product Warranty . 9-1 HRL Series HRX-OM-Y098 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Series VQ Base Mounted Metal Seal/Rubber Seal

(Specify a model with 9 to 16 stations by using a manifold specification form.)

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

0.4

(Specify a model with 9 to 16 stations by means of the manifold specification sheet.)

VQ4000

VQZ SOL.A 8 8 () (+) Purple White SOL.A SOL.B 21 21 () (+) Brown White 8 stations SOL.B SOL.A 9 9 () (+) Gray Black SOL.A VQD SOL.B 22 22 () (+) Pink Red 9 stations Connector terminal no. SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types.

VQ5000

Other models have conduit ports in two locations. 28 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram 2-G1/2 Note) Conduit port 146 111 83.5 106 59.2 46.8 9 9 2n-1/2 (ports A, B) 55.5 M5 ground screw U side 32.5 34.5 n 12 X ... ... ... ... ... ... ...

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.