Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Plug Connector, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

DOC1003077

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

MGZ Series

N S + Stroke H B ZZ + Stroke Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18

VXZ

K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual

21

Example: Power supply voltage 24 VDC Auto switch internal voltage drop 4 V Example: Load impedance 3 k Auto switch leakage current 1 mA (Solid state) When two auto switches are connected in parallel, malfunction may occur because the load voltage will increase in the OFF state.

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.