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Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-

8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 * Models

3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

3 3 3 63 7.5 7.5 7.5 7.5 3.5 3.5 3.5 3.5 Minimum Stroke for Auto Switch Mounting D-M9 D-M9V D-A9 D-A9V D-M9W D-M9WV D-A9AL D-A9AVL Number of auto switches mounted 1 10 10 2 10 15 Operating Range Auto switch model Size 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 5.5 5.5 5.5 5 5 D-A9/A9V 7.5 8 8 7 6.5 Since the operating range is provided as a guideline including hysteresis, it cannot

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

-X Technical Data 1501 A CY1S Series Construction CY1S/Bilateral piping type For 6 #8 For 6 For 10 23a 29a o !5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !

Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option

R T S 660mm Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

DC (+) q 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC() 1 Brown DC(+) DC () w CH1_OUT1 e N.C. r CH2_OUT1 t 2000 CH3_OUT1 y CH4_OUT1 u N.C. i Internal circuits and wiring examples PF2A200 PF2A201 DC (+) DC (+) 4 3 2 1 4 3 2 1 (Brown) (Brown) Sensor Sensor Sensor + Load Load Load Load + NC NC 24 VDC CH1_OUT1 CH1_OUT1 24 VDC (Black) (Black) 4 3 2 1 4 3 2 1 Load Load

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 A B CLJ2 CLM2 A CLG1 CL1 B Extension locking Without magnet !0o#1 @8 t MLGC Section A-A' CNG MNB !3 @0 CNA CNS Section B-B' (Both ends tapped) CLS Retraction locking CLQ Section B-B' (Through-hole) !4 !7 !8 #3 RLQ MLU MLGP ML1C With bumper Rod end male thread Note) The sectional drawing above shows the locked condition. Component Parts No.