Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

High performance type Step Motor Controller (Servo/24 VDC)

0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1

Step Motor Controller (Servo / 24 VDC)

44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1

7ND9071en

Housing 15 1 O-ring 16 1 Washer 18 1 Wave spring 19 1 Bushing 36 1 Grounding screw 39 1 Inner cover 42 3 Screw 47 3 Screw 57 1 Conduit entry adapter 61 1 Spool valve cover 63 1 Gasket 100 1 Cover ND92_E1 = H087634, ND92_E2 = H087617, ND9300 = H087628 ND72_E1 = H087634, ND72_E2 = H087617 104 1 O-ring 107 1 Screw 109 1 Pointer 110 1 Stop screw 111 1 Spring 120 1 Prestage unit H039292, also

Electric Actuator

2 (ISO14644-1)!

70pvpump

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

pa

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Return Filter

The warranty period of the product is 1 year in service or 1. The warranty period of the product is 1 year in service or 1.

Compact manifold regulator ARM5 Series

Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRH 28 2 42 3 SRP 56 4 70 5 SRF Tie-rod for centralized supply block 84 6 98 7 ITV 112 8 126 9 IC 140 10 For 1 station 14 mm x 1 station = 14 mm Length ITVH For adding a regulator Tie-rod part no.

Brake mechanism added

2 3 4 3 2 1 699

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.