LJ1H

B 89 A A B Section BB Coupling P.C.D.

Battery-less

C B M A W Model LES25 B side parallelism to A side 0.4 mm B side traveling parallelism to A side Refer to Graph 1.

Air Slide Table

D B B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.

Table of Contents

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

Electric Actuator/Slider Type

M J D 4 x O1 thread depth R M Y K Note 2) L B + Stroke 4 x O1 M S A + Stroke thread depth R EH Note 1) Range within which the rod can move.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

B B B B 21 7 35 17.5 A A A A A (DIN: 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in throttle valve (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 24 18.5 B B (Pitch) P = 16 5.5 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) 85.4 77.9 52.6 [59.6] M8 x 1 66.6 127 0.6 0.6 57.1

Smooth Cylinder/Low Speed Cylinder

Applicable bore size (mm) 32, 40 50, 63 80 100 Dd9 B C H d m t d L1 Part no.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Table of Contents

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model MHW Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) MRHQ Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only. Misc.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

SYJ3000/5000/7000

B 5 33.1 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 A A 20 15 5 11.8 B B 1.5 (Pitch) P = 10.5 M5 x 0.8 (A, B port) 11.8 M8 connector (WO) L plug connector (L) M plug connector (M) 53 M8 x 1 35.5 0.8 0.8 96.8 0.8 82 0.8 69.8 [72] 60 [62.2] 68.9 111.5 [115.9] 98.6[103] 61.5 79 [83.4] 91.9 [96.3] 109.7 94.9 (Lead wire length) Approx. 300 59.6 [66.6] Approx

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ B D E F M T1 T2 Part no.

Table of Contents

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Compact 5-Port Solenoid Valve

2(B) port side: Yellow (DIN rail) (8) 9.5 A A A A B B B B 78.5 66.5 66.2 4 A 4 A 4 A 4 A 47.3 B 2 B 2 B 2 B 2 (5.5) (35) 4.6 (26.1) 5.3 2.2 (12.2) (14.8) 18.6 4 x M4 Mounting hole (Recommended tightening torque: 1.4 N.m) 18 L2 44.8 1.5 18 0.6 m, 1.5 m, 3 m (Lead wire length) (L4) (DIN rail mounting hole pitch: 12.5) (5.3) (Fitting for the type with P/E ports on the U and/or D sides) (L3)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Size 20 30 40 Mounting style Electrical entry/Lead wire length B F Basic style Flange style Grommet/Lead wire 0.5 m Grommet/Lead wire: 3 m Grommet/lead wire 0.5 m Grommet/Lead wire: 3 m Grommet/Without lead wire Connectors are available only for auto switch types D-R73, D-R80, D-T79. Lead wire with connector part nos.

Table of Contents

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.