MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

VHS

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 Pipipng direction VHS500-06 VHS501-06 SA Right IN1 (P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2) Weight (kg) VA 1 (P) 2 (A) 21 105 76 54 35 35 57 93 2 (A) 3 (R) SA 0.25 0.34 Left or right to the front face of the handle.

I/O Configurator (NFC version)

Preparation STEP 1 Start the I/O Configurator (NFC version) STEP 2 Login to Administrator mode STEP 1 Start the I/O Configurator (NFC version) (1) Start up the I/O Configurator (NFC) and connect the NFC reader/writer to the PC. "R/W detected" will turn on in green when the PC detects the NFC reader/writer. : Refer to 2.

ISO Standard Hydraulic Cylinder

3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Wireless System

0 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit:

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

VXA21/22

Base, Body Seal Aluminum NBR, FPM, EPR Model Manifold base Port A Rc(PT) Port P Rc(PT) Port R Rc(PT) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations ManifoldO Manifold style Manifold stations B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 4.1-73 VVXA31/32 Common (C.O.)

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

MHF2

1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Parts list Parts list Note No. Description No.

Transfer

1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

0.01

4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

1 Cover Resin e Return guide Resin r Scraper Stainless steel, NBR t Electroless nickel plated Piston Brass y Electroless nickel plated Joint shaft Carbon steel u Electroless nickel plated End cap Brass i Rod bumper Polyurethane o Steel balls High carbon chrome bearing steel !0 Electroless nickel plated Plug Brass, PVC !1 O-ring NBR !2 !0 r e t Piston seal NBR !

XL-OMY0001

R 25 40 50 63 80 H4100 XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 H5120 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-22 XLA-80H5-2 2 XL1A25-60S-2 8 XL-OMY0001 4-1.

VXA31/32

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Contents CE1 Operating pressure (MPa) Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction 0.7 0.5 0.3 12 16 20 25 CQSY12-PS Piston seal 1 pc. Rod seal 1 pc. Tube gasket 1 pc. Grease pack (10 g) 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE1 Operating pressure (MPa) Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction 0.7 0.5 0.3 12 16 20 25 CQSY12-PS Piston seal 1 pc. Rod seal 1 pc. Tube gasket 1 pc. Grease pack (10 g) 1 pc.

Series AP3100

1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02 25 50 57 2PW Multi turn round knob Specification Code No code 1/4 turn lever knob 1/4 turn round knob Connections (Inlet, Outlet) Indicator switch Handle 4) ISH Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1, !