Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 06 (3/4), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

7.4

1(P) 3(R2) 3(R2) OUT side port size Option IN side port size Nil None D DIN rail mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting C4 4 One-touch fitting Note) When multiple symbols are specified, indicate them alphabetically.

Compact

(s P. 11 ) (2) Pressing force F and overhang L1 should be within the range as shown in the graphs. MXZ16 160 OUT side IN side 140 0.7/ Supply pressure [MPa] 120 Pressing force [N] F 0.5/0.67 100 80 L1 60 0.3/0.4 40 20 0 18 0 10 20 30 40 Allowable overhang L [mm] Allowable supply pressure on OUT side and IN side is the theoretical output of cylinder when pressing force is required.

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

NCM-A

18-18 0.50 0.60 0.51 90 0.95 0.28 3.39 0.09 1/8 NPT 0.25 5/18-18 0.62 0.72 0.47 90 1.17 0.28 3.47 0.09 1/8 NPT 0.41 3/4-16 0.88 0.85 0.51 45 1.50 0.31 3.91 0.09 1/8 NPT 0.50 1 1/4-12 1.19 1.20 0.81 45 1.91 0.59 5.11 0.12 1/4 NPT 3 Series NCM-A Dimensions ZB + STROKE LB + STROKE 0.50 W K A L ZC 2-ZD MM YC WA N KK UNF-2A B -0.003 0.000 PILOT Y WB D ACROSS FLATS NN UNF 2A Bore MM KK A B D E F

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

NAMUR

) NPT Nil F N Voltage Manual override/Classification C F H J P V Y Z 9 1 2 3 4 5 6 7 8 A B 115 VAC, 50/60 Hz 32 VAC, 50/60 Hz 42 VAC, 50/60 Hz 230 VAC, 50/60 Hz 100 VDC 6 VDC 48 VDC 110 VDC Other voltages 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 48 VAC, 50/60 Hz 12 VAC, 50/60 Hz 24 VAC, 50/60 Hz Electrical entry Non-locking

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series Model AS-F AS-F Minimizes installation time and cost Port size Applicable tubing O.D.

AS

AS-F AS-F Model TMH No need for tools, reducing time required for mounting.

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Parts list t f " ifote NO. f) 0 Body A PST Elbow body PST PST Knob 8 e Electroless nickel plated Pilot body Brass (1) SodyS Brass Electroless nickel plated 0 Electroless nickel plated Electroless nickel plated Brass Needle Eleclroless nickel plated 0 Needle guide Brass Guide Brass 0 (!) Lock nul Brass Electroless nickel plated Valve Piston Brass ell Eleclroless nickel plated SIaln!

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Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R. Fittings & Tubing Air Cylinders Rotary Actuators Mounting bolt C D Flat washer Note) Note) Be sure to use the attached flat washer when mounting a cylinder with through-holes.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil F N T Rc G NPT NPTF Nil Non-locking type M Locking type (Tool required) Valve option Surge voltage suppressor Nil V Standard For vacuum Nil None CE-compliant CE-compliant With surge voltage suppressor Port size CE-compliant Nil Q 02 1 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

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Temp characterisllcs + 1% F. S. max. Repetition aCClJracy Power supply 12-24VDC (Ripple 10% max. ) 4SmA max. Consumption current Back light Yellow-green Emergency display Display", Red !