• When re assembling, tighten the cover through an extra 2--3+ from the 155,9 OUT 31 ,2 187,0 93,5 :,24.7 original assembled position. 20 63 140,2 IN 28,0 84,1 112.1 168.2 .
size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31
1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31
Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15
closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31
20 Guide tube fitting Aluminum alloy Chromated 21 Pipe Stainless steel 22 Hexagon socket head cap screw Alloy steel Zinc chromated 23 Hexagon socket head cap screw Alloy steel Zinc chromated 24 Spring washer Alloy steel Zinc chromated 25 O-ring NBR 26 O-ring NBR 27 M5 plug 28 Metering valve with silencer ASN2-l 29 Solenoid valve 30 Sub-plate (Left cover side) Aluminum alloy Chromated 31
Compact type CXSJ 2122CXSJ/ 1112Dimensions / 6 10 9+ST 4-M3 x 0.5 thread depth 3.5 8 2.7 6.7 2-M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31
(Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31
D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31
Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
K 2 sides x 4 places 0.25-counter bore 0.15 depth M1 E A + Stroke 0.13 (Inch) C H E D A Symbol Bore Q P K J I M1 M2 W Z 1/8" to 1"st 1 1/4" to 2"st 1/8" to 1/4"st 3/8" to 2"st 075 (3/4") 106 (1-1/16") #10-32UNF 0.46 0.81 1.38 0.31 1.25 1.56 0.06 0.25 0.86 1.22 #10-32UNF 0.19 1.31 0.38 5/16-24UNF 0.70 1.19 0.52 0.88 1.50 0.50 1.56 2.03 0.16 0.44 1.69 NPT1/8 0.25 1.72 0.56 31 Series NCQ8 Dimensions
www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option) AMH550 AMH650 AMH850 Port size N.C. auto-drain N.O. auto-drain Drain guide 01 B 06 10 14 B 3 4 1B 1 8 Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 4 B 1 B 1 2 20 2B IN-OUT reversal direction -T Element service indicator Option HA AT ID AMG AFF AM Misc. 14-20-31
Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.
S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension
Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX 73 90 110 FZ 93 114 138 A 221 243.5 299.5 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 L 45 54 56 N 9 11 13 O QB 7 8.5 10 B 93 99 128 QA 10 12.5 12.5 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31
RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31