Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 100.00000 lb. VVD.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available RODLESS CYLINDER. CY1F CYLINDER. 6.16900 lb. 585.

Model: 31, Orifice: 1 (1.5mm), Style: 2 (N.O., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil)

Model: 31 (4400 l/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: S (Straight Style 3m), Pressure Display Unit: 4 (PSI)

Model: 31 (4400 l/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(1) Applicable tubing O.D. d (g) Weight H2 D2 L1 L2 L3 M AS121F-M5-06W2 AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5 x 0.8 13.2 6 19 17 31

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

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-31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' .. I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/4 24 17 28.6 70.3 61.8 ASP630F-04-12S-X369 12 21.7 35.2 49.5 25 21.8 ASP330F-N01-07S-X369 NPT1/8 10-32UNF 12 8 14.2 23.9 31

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

preparation equipment HB HT HC X N A W K 2-Plug H HA CB 2-P (Piping port) Y HP Counter bore depth C 4-counter bore B T T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-23 3.2 ASP 14 AS231FSG1-G01-04 4 8.2 13.9 25.1 15 AS231FSG1-G01-06 6 10.4 26.2 20.4 38.5 15 AS231FSG1-G01-08 8 13.2 10.2 16.4 30.1 21.5 39.7 14.2 16 AS231FSG1-G02-04 4 7.2 9.6 12 13.2 24 17.5 35.7 43.8 42.4 38.3 36.9 13.3 21.5 16.2 1/8 13 ASN AQ 27 AS231FSG1-G02-06 6 10.4 19 33.8 21.4 43.9 29 AS231FSG1-G02-08 8 13.2 34.9 23.5 46 14.2 30 AS231FSG1-G02-10 10 15.9 20.9 38.1 24.7 47.3 15.6 31

Flame Resistant

Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D

Air-hydro Unit

Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31

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When re assembling, tighten the cover through an extra 2--3+ from the 155,9 OUT 31 ,2 187,0 93,5 :,24.7 original assembled position. 20 63 140,2 IN 28,0 84,1 112.1 168.2 .

Power Clamp Cylinder

size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89