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Page 2 last updated 11/03/03 10:05 AM Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE INPUT SIGNAL CURRENT SIGNAL TYPES (ITV20 -0 , ITV20 -1 ) Supply Voltage VS Input Signal A 24VDC (ITV20 0) 4~20mA (ITV20 -0 ) 12VDC (ITV20 1) 0~20mA (ITV20 -1 ) VOLTAGE SIGNAL TYPES (ITV20 -2 , ITV20 -3 ) Supply Voltage VS Input Signal VIN 24VDC (ITV20 0) 0~5VDC (ITV20

0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

A A1 E1 L1 MM R1 U1 NX NDH10 U1 L1 A A1 L1 U1 A1 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 8 10 18 22 28 32 M10 x 1.25 10.5 12.8 14 A M14 x 1.5 22 14 12 14 (mm) M18 x 1.5 28 18 16 20 Applicable bore size (mm) Included

0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Dual Rod Cylinder/Basic Type: Slide Bearing Series CXS 6, 10, 15, 20, 25, 32 Replacement Procedure is P.339 Construction CXSM6 @0 !9 @1 CXSM10 CXSM15 @0 @1 !9 @0 @1 !9 CXSM20 to 32 @0 @1 !9 The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXS. *BLUE links will lead to purchase pages. Replacement Parts: Seal Kit Kit no.

9 8 7 6 5 4 3 2 1 1 SW8 0 0 0 0 0 0 1 F O F F O 9 2 8 3 7 4 6 5 0.01 to 0.99 0 to 299 sec sec LED 11 OUT LED 12 CAS LED 13 IN LED 14 POW LED6 LED5 LED4 LED3 LED2 LED1 LED10 LED9 LED8 LED7 140 5 ON 1A OFF Power supply switch COM FG AC2 AC1 SV9 SV10 SV7 SV8 SV5 SV6 SV3 SV4 SV1 SV2 5 140 5 Output terminal block Common terminal block 4 x 4.5 Power supply terminal block 34 or less 38 or less 26

Byte 0 Offset Byte 1 Offset Byte 2 Offset Byte 3 Offset Bit: 7 0 16 outputs type 32 outputs type Fieldbus interface connector layout 0: Solenoid valve: OFF 1: Solenoid valve: ON Bit: 7 0 6 BUS OUT: M12 4-pin socket D-coded (SPEEDCON) 1 Bit: 7 0 No.

[Uni][] [F 0] -29No.PF-OMO0004CN-E [ Ft] PFMB7201 0.087.06 cfm 0.087.42 cfm 3 099,999,999.9 ft 0.01 cfm 3 0.1 ft 3/pulse 0.1 ft -0.367.42 cfm (-0.070.07 [ 0]) 3 099,999,999.9 ft 0.01 cfm 3 0.1 ft -30No.PF-OMO0004CN-E [F 1] OUT1 OUT1 ( )OUT2 H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) 0 OFF 0 ON 0 OFF 0 ON -31No.PF-OMO0004CN-E ( )OUT2 3 3 3 3 3 3 ON OFF ON

(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !

.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C

/VQZ 95 , N.O.) 1 2 3 1 2 3 0 1 0 1 Caution 3 port valves have the same external appearance as the 5 port valves. When using this type, 4(A) port on the 3 port valves can be used as 4(A) port on the 5 port valves manifold, too. Besides, theres no problem, even though 2(B) port can be either plugged or unlugged.

2 [F 0] [F 1] [oUt1][HYS] P_1 H_1 ON ON OFF OFF 2 1 () -49No.PS-OMR0001CN-J 4 [F 2] -50No.PS-OMR0001CN-J 4 [F 6] 20R.D. 2 [F 0] [F 6] [FSt][] (%) 2 -51No.PS-OMR0001CN-J 4 [F10] SUPOUTOFF 2 [F 0] [F10] [SUb][] SUP OUT OFF 2 -52No.PS-OMR0001CN-J 4 [F80]OFF 30 OFF OFF "ON"() OFF 2 [F 0] [F80] [dSP][] OFF 2 () -53No.PS-OMR0001CN-J 4 [F81] ON 58 2 [F 0] [F81] [

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/C VBA Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C VE Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV 0 Laser dust monitor (intake rate 28.3 l/min) 0.01 0.01 0.1 1 10 Particle diameter (m) Time Time

BMG2-012 928 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions 1122MHL2-10D 2 x M4 x 0.7 thread depth 5 (Mounting thread) D C A B 2 x 4.5 through (Hole for mounting body) 9 +0.025 3H9 0 depth 3 34 When closed E When closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch