SZ3000 If connections are made incorrectly, failure may occur not only in the manifolds and valves, etc., but also in the PLC (control side) and power supply, etc. 9 Series SZ3000 Construction JIS symbol 2 position single 2 position single w e q r t y u o !0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !
Clip part numbers AZ-T-VCB Page 1 Valve model How to Order Valves Page 5 Valve model Note) Indicate the valve model, as a label will be attached to the clip. Seal part numbers Valve For VCB20 OR-1860-120F Tilt the screw driver down in direction so that the clip slides out in direction .
Body r Vacuum sensor unit t Nozzle y Diffuser u P397110 Other than vacuum switch Detent plug i P397176 Vacuum switch specifications Lead wire cover With valve Front cover B !2 With valve Valve plate !3 With valve Needle !4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !
Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.
t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!
2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !
1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
Data Note 16 CJ-L016B CJ-F016B CJ-T016B T-bracket is used with double clevis (D). 1. For Series CJ2X, 0.1 Nl/min is the values at maximum in terms of its construction and there is internal leakage (ANR).
5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
Nil S n Mounting style CNA Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style B L F G U T D CNS Auto switch Nil Without auto switch (Built-in magnet) CLS For the applicable auto switch model, refer to the table below.
SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70
When fluid is exhausted from the port 12(P1), the valve r connected with the piston t is closed by the return spring y. When valve opens When pressurized air enters through the port 12(P1), the valve piston moves upward by the pilot air that enters below the piston and the valve element opens.
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20
7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
1 Resistor MI W S (g) Zener diode Auto switch model D-A33C D-A34C D-A44C CEP1 40 162 162 160 CE1 50 166 166 164 D-A34C, D-A44C Applicable bore size (mm) 63 184 184 182 CE2 80 210 210 208 Choke coil Reed switch LED 100 232 232 230 ML2B OUT (+) Terminal no. 1 OUT () Terminal no. 2 Resistor Dimensions Zener diode C J G5-S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T