ZR

Description q w e r Material Aluminum Stainless steel PBT PBT Polycarbonate Note Refer to (3) below. Refer to (2) below. Refer to (1) below. No. Description Pilot valve assembly Valve body assembly Ejector assembly Silencer element Filter element Part no. Material PVF PVF Manifold base Release flow rate adjustment needle Function plate Individual spacer Filter case y u i o !

Ejector Valve Unit Series ZYY/ZYX 1

3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No. SY114Urban white Resin Manifold block 3 port solenoid valve q o ZSE1-00--X130 Urban white Zinc die-casted Body Vacuum switch w !0 Urban white Resin Silencer cover P44027A End plate assembly e !1 Aluminum Nozzle AN203-KM8 Silencer r !

q"s

a %silrc q"s cAT.ES60-15o Electro-Pneumatic Regu lator Sensitivitfo;, 2 Xp^(l00 kpa speciricarions) Linearity: Within *,tg6-{f.S.)

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KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

asilltr

s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

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mode 1 isolaled crmnm A$lnlfics 4ir/4out31 sb, mode 1 Noie 1) Indicare thesze nthe specilication sheel in lhe case of Cl4 and Llv4 Nore 2) q,mbols tor inch s zes are 1to t2(24) N1:o1l8' N3:sY32' N7 6114' NM:l\,4ixed Thelop poded elbow is LN! and the bottom Porled e bow is BN !

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

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N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

BP1000

No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

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O-Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Q 14.5 22 I 2 25 4 x M8 x 1.25 Effective thread depth 12 NA CC0.1 ZZ + Stroke S + Stroke W K 25 2 TF TN Nil P (Piping port) R Model L K I D B CC ZZ X W S NA Q V 300.007 0.037 100 12-REA50 M8 x 1.25 32 58 55 180 G1/4 86 52.4 25 110 27.5 176 60 60 Rc1/4 NPT1/4 320.007 0.043 12-REA63 M10 x 1.5 38 65.4 72 26 122 69 34.5 188 70 70 192 Rc1/4 NPT1/4 G1/4 862 A Specific Product Precautions Be sure

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 q Right cover Black anodized Aluminum alloy Black anodized Sub-plate Aluminum alloy !

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Description Material Surface treatment ZX t NBR, Silicone rubber, Urethane rubber, Fluororubber, EPR u o Pad 1 ZR r e w Adapter plate 2 Aluminum ZM w Hard chrome plated Piston rod 3 Carbon steel w Spring 4 Stainless steel ZMA Buffer body 5 Aluminum Electroless nickel plated Buffer adapter 6 Brass q q q ZQ Electroless nickel plated Adapter A 7 Brass Electroless nickel plated X type adapter

AME

Aluminum die-casted Aluminum die-casted Material Note q Description Housing Body Chrome treated Epoxy coating on inner surface Note: Sight glass is indicated in the figure above for easy understanding of parts, however mounting position is different. Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted.