Square Tube Type Air Cylinder Series MB1

84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

High Vacuum Angle Valve, XL Series

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

45

= 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Cylinder with Turntable Series MGT

0.45 x 4 l Auto switch w When tightening an auto switch mounting screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.

125

9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12

Air Pilot Operated Series NVSA

"A" End AXT 334-16-1 10 Bushing.Body t2\ axT 334-22-6 1 1 Cushion-Pilot Covea A' End axT 3s4-12.1 PILOT COVER '1" enol"a" ero '124 Type "O" w/o Operators d(4) Screws (ea.) 12) Alum. D.C. PC 0102-1 I N 124 Typ "N". w/operator & (4)Screws (ea.) (2) Alum. D.C. PC 01031 r2c Type "B" w/o Operalor. w/(4) Screws (ea.) Alum. D.C. PiJ0112. 12D Type "4" . w/Operalor & {4) Screvr's (ea.) Alum.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to

MXU

tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction

MXU

torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

bases are composed by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Plug-in/Plug Lead: Single Unit

specifications. 2-6-39 Series VQ5000 Construction Plug Lead Unit Metal seal Rubber seal type e q w q w e VQC SQ VQ0 VQ4 VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2