VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

ITVH

Self-diagnosis: 5% F.S. or less Switch output PNP open collector output: Max. 80 mA Hysteresis: 3% F.S.

Hand Valve Series VH 1

VHS 5-8-15

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

D-F6N/D-F6P/D-F6B

Additionally, note that the 12 VDC relay does not apply to the auto switch. 5.

MHL2

8@1@5 tyu@3@4 Order 1 pinion assembly per one unit.

IR1000/2000/3000

Spacer 6 Spacer with L bracket (3 + 5) 7 Spacer with T bracket (4 + 5) AF2000 AF3000 AF4000 AFM2000 AFM3000 AFM4000 B210L B310L B410L B210T B310T B410T Y20 Y30 Y40 Y20L Y30L Y40L Y20T Y30T Y40T 5 Spacer Approx. 133 Approx. 172 97.5 3 L bracket 4 T bracket 135 1 AF2000 IR1000 2 AFM2000 178 1 AF3000 IR2000 2 AFM3000 234 1 AF4000 IR3000 2 AFM4000 Accessories (Optional)/

VT307

(Refer to Figure 1.) 4) Remove the cable gland (4) and plain washer (5) and rubber seal (6). 3. Wiring 1) Passing through the cable (7), cable gland (4), plain washer (5), rubber seal (6) in this order, and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11).

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

CM2x-OM0230Q

AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1. (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) 7 - 5) 6) 7) 8) 9) 24. 1) 2) 3) 8 - 1) 2) 1.52 2 2. 2-5. ,AS 9 - 2-6. P7.1. 1.

RS2H-OM0045P

AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

VP3145/3165/3185

DIN terminal: VP3145-D Conduit terminal: VP3145-T A B A B VQZ VZ VS Conduit terminal with indicator light (TL) G 1/2 Light Light Max. 11 Applicable cable 6 to 12 VFN G 1/2 Rc 1/4 Rc 1/4 ( ): With indicator light (TL) 4-10-5 6 Series VP3145/3165/3185 Dimensions: VP3165 Grommet: VP3165-G A B G 1/2 Manual override Lead wire length 200 mm External pilot port Rc 1/4 Rc 1/4 (PE port) Courtesy

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

SFOD-OMT0012

Product Specifications . 5 2.1 Features of the Setting software . 5 2.2 Applicable PC . 5 2.3 Applicable controller . 5 3. Start-up . 6 3.1 Preparation . 6 (1) Software installation . 6 (2) Installation and wiring . 6 3.2. Start-up . 6 (1) Supply of power . 6 (2) Start-up of the Controller setting software . 6 (3) Alarm check . 8 4.

EX510-GMJ1.eng

Station number 20 (No.2) 2 (No.6) 1 (No.7) 40 (No.1) 8 (No.4) 4 (No.5) 10 (No.3) SW2 OFF 1 OFF OFF OFF OFF OFF OFF ON 2 3 4 OFF OFF OFF OFF OFF ON OFF 6 5 4 3 2 1 ON ON OFF OFF OFF OFF OFF ON ON : Switch No.5 and No.6 are unused. (Turn them OFF.) OFF OFF OFF OFF ON OFF OFF : : : : : : : : HOLD/CLR setting (Switch No.1) The setting is as follows.

PF3W7x-X445.eng

Otherwise it can cause failure or malfunction of the system. 11/4 54 mm Temperature upper limit exceeded Flow range, unit specification and mounting of temperature sensor are displayed Set value Sets the ON or OFF point of the switch output. 50 oC 11/2 54 mm The fluid temperature is above 110 oC. Reduce the fluid temperature.

CJ2

CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11

Pressure Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-11 Miniature regulator ARJ310 Small, compact Allows smaller mounting pitch Bracket Pressure gauge M5 0.2 to 0.7 1 8 / to 2 1 4 Pilot operated regulator AR425-925 AR435-935 Compact manifold regulator ARM10/11 / 14-4-15 Internal pilot type Relieving

Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Slit Valve

Replaceable Bellows 5 Customer can replace bellows. 534