Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: Basic Style, Size: 50, Suffix: w/Internal Shock Absorber, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: High Precision Style, Size: 10, Suffix: With Adjustment Bolt, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: High Precision Style, Size: 20, Suffix: With Adjustment Bolt, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: High Precision Style, Size: 50, Suffix: With Adjustment Bolt, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: Basic Style, Size: 20, Suffix: w/Internal Shock Absorber, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: High Precision Style, Size: 10, Suffix: w/Internal Shock Absorber, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: Copper, Flourine & Silicon Free+Low Particle Generation, Vacuum Suction Type, Style: Basic Style, Size: 30, Suffix: w/Internal Shock Absorber, Auto Switch: -, Lead Wire: -, Number: -

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22

Fieldbus system EtherNet/IP compatible SI Unit

) Monitor lower limit value 0 to 65535 (Low byte first) 12..13 0..7 (Ch0 out) Upper limit value 0 to 65535 (Low byte first) 14..15 0..7 (Ch0 out) Lower limit value 0 to 65535 (Low byte first) 16..17 0..7 (Ch0 out) Fault value 0 to 65535 (Low byte first) 18..19 0..7 (Ch0 out) Idle value 0 to 65535 (Low byte first) 20..21 0..7 (Ch1 in) Monitor upper limit value 0 to 65535 (Low byte first) 22

EXxx-OMU0020CN

EX245-DY1-X37 EX245-DY1-X37 . 4-5 EX245-DY1-X37 Force to OFF Force to ON Hold last state Digital Output 0 Force to OFF Force to OFF OFF Force to ON ON Hold last state Force to OFF Force to ON Hold last state Digital Output 1 Force to OFF Force to OFF Force to ON Hold last state Digital Output 7 Force to OFF 22 No.EX-OMU0020CN 4.3.

EXxx-OMQ0015CN

No.EX-OMQ0015CN PROFINET SI // EX600-SPN# EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 LED 17 19 19 20 21 21 22 22 23 23 23 25 26 35 35 56 GSDML 56 56 SIEMENS PLC S7 57 62 65 66 66 71 -1No.EX-OMQ0015CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

EXxx-OMN0035CN

FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24 V *1 DC24 V 3 0 V DC24 V 3 *2 0 V 4 4 2.7 k 2.7 k 1EX600-DXPC1 2EX600-DXNC1 IP67 2 OFF 0.5 mA () OFF 0.5 mA 3 0.5 mA SI -21No.EX-OMN0035CN-A (3)EX600-DXE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 24 V() 11 0 V() 12 0 V() 13 FE 14 1 15 3 16 5 17 7 18 9 19 11 20 13 21 15 22

Digital pressure switch for energy-saving control ejector

Product Number ZME-ZSE***-A Table of Contents Safety Instructions 2 Model indication and How to order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 22

Digital Flow Switch (Remote type monitor unit)

No.PF-OMJ0018-F PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PFM3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Mounting and Installation 13 Installation 13 Wiring 15 Flow Setting 19 Function Setting 21 Default settings 21 F0 Selection of connected sensor Unit selection function 22

Flow sensor

Refer to the dimension drawing of the bracket (page 22) for mounting hole dimensions. -15No. PF-OMK0004-F Piping The required tightening torque of the fitting is 1 to 1.5 Nm. If the tightening torque is exceeded, the product can be broken. If the tightening torque is insufficient, the fittings may become loose.

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

Digital Flow Monitor

No.PF-OMU0007-D PRODUCT NAME Digital Flow Monitor MODEL / Series / Product Number PFG3#0 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 12 Installation 12 Wiring 14 Flow Setting 20 Outline of Settings 21 Initial Setting 22 3 Step Setting Mode 26 Simple Setting Mode 28 Function Selection

Digital Flow Switch (Integrated display type)

PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PF2A7## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Piping 16 Wiring 17 Outline of setting 19 List of outputs 20 Initialize mode 21 Setting procedure of initialize mode 22

Digital Flow Switch (Integrated display type)

Switch (Integrated display type) MODEL / Series / Product Number PF2A7##H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize mode 21 F_1 Selection of display mode 22