High Precision Digital Pressure Switch, Series ZSE40/ISE40

1k Analog output (Note 2) Auto shift input (Note 3) Enclosure Ambient temperature range Ambient humidity range Withstand voltage Environmental resistance Insulation resistance 10 to 500Hz at the smaller of amplitude 1.5mm or acceleration 98m/s (10G) in X, Y, Z directions for 2hrs. each (deenergized) 980m/s (100G) in X, Y, Z directions 3 times each (deenergized) In a temperature range of 0

10-cy1h-e

Grease pack part no. for 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 25: GR-S-010 (10 g) Wear ring A Special resin 10: Not available CY1H10-PS 10 CY1H10-PS Wear ring B Special resin CY1H15-PS 15 20 25 CY1H15-PS CY1H20-PS CY1H25-PS Set of left nos. @9, #0, #1, #2, #3, #4 Piston seal NBR CY1H20-PS CY1H25-PS Scraper NBR O-ring

AMR3000 to 6000

211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

06-reas-e

For 10 grease pack part no.: GR-F-005 (5 g) for external sliding part GR-S-010 (10 g) for tube interior For 15 grease pack part no.: GR-S-010 (10 g) Piston seal NBR Scraper NBR Cushion seal NBR Seal kit includes @6 to #2.

06-real-e

Contents Bore size (mm) Set of left nos. @8, @9, #1, #2, #3, #4 @8 @9 #0 #1 #2 #3 #4 Cylinder tube gasket NBR REAL10-PS 10 REAL10-PS Guide shaft gasket NBR Set of left nos. @8, @9, #0, #1, #2, #3, #4 REAS15-PS 15 Wear ring A REAS15-PS 10: Not available Special resin Wear ring B Special resin Seal kit includes @8 to #4. Order the seal kit, based on each bore size.

06-rear-e

8, @0, @1, @2, @3, @8 Set of left nos. !8, !9, @0, @1, @2, @3, @8 Note) !8 !9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC.

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

SY3000-OMH0002

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 /

Return Filter FH100 Series

Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70

Air Cylinder NCM Series Stainless Steel Cylinders

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?