99

) Aldehyde Formaldehyde (35%) Methyl alcohol, butyl alcohol, ethyl alcohol, propyl alcohol Alcohol 14 Dioxane Ethyl ether Ether 12 Ethyl ether Hexane Benzene, toluene, hexane, xylene Benzene Hydrocarbon 10 Can be used depending on temperature conditions (please consult with SMC). 8 0 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow time (min) Per JISK3834 64 High Precision Filter for Liquids FGH

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEY Encoder cable (7) 25.5 36.5 64 Note 2) (128) Note 2) 94 5H9 ( ) depth 6 +0.030 0 6 50.5 LES 58 LEPY LEPS LER Encoder Z-phase detecting position L LEH A (Table traveling distance) (58) 167 (B: With lock/207) LEY -X5 (60) Stroke 17 37 (4) 21 Motor cable (6) 11LEFS 50.8 45 11LEJS 11LEJS 35 6.7 14.5 Vacuum port Rc1/8 Note 3) Encoder cable (7) 25ALock cable (4.5) 25.5 LEC Motor option B:

Compact Manifold Regulator

position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Power connector PWR OUT M12 (5-pin) M12 (5-pin) Power Socket Socket Power supply (Control and input) 24 VDC 10%, 24 VDC 10%, 8 A DC24 V 10%, 4 A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35

PFxx-OMP0001CN

IN(66) IN OUT OUT IN 8cm () Rc1/2NPT1/2Rc3/4NPT3/4 2830 Nm 1/2 30 mm 3/4 35 mm 9mm 2F.S. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

MX-OMP0051

35 41 60 60 MXQ20(A,C) 30.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 34.9 35.9 35.9 35.9 41.9 50.9 75.9 75.9 75.9 MXQ25(A,C) 32.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 16 5.4 5.4 5.4 5.4 5.4 15 25.6 25.6 31.6 48.6 25.6 MXQ8B 27 11.9 11.9 11.9 11.9 11.9 11.9 16 23.1 23.1 31.1

CEx-OMQ0013

l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5. (DC1224V) 1. 1-1 CEU2 1 2 32 32 1 16 P1 P2 P3 .

LEF-OM006xx

LEF-OM00601 / / / LEF Series LECSeries /LEC6 . 2 1/. 4 . 4 . 5 . 7 2 . 9 LEF / . 9 LEF/ . 12 . 14 . 15 3 . 17 . 17 . 18 . 21 . 27 4 . 30 5 . 31 51 . 31 52 . 32 53 . 32 54 . 33 55 . 34 56 . 34 6. 35 61 . 35 62 . 35 63 . 36 64 . 36 65 . 38 . 39 LEF Series/ (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Store in an area that is shaded from direct sunlight and has a temperature and humidity within the specified range (10C to 60C and 35 to 85% no condensation or freezing). 3. Do not apply vibration or impact to the product during storage. 2.6 Maintenance Warning 1. Do not disassemble or repair the product. Fire or electric shock can result.

JXCx-OMT0005CN

4byte 0 IN5 IN4 IN3 IN2 IN1 IN0 1 FLGTH JOG(+) JOG(-) SETUP RESET DRIVE SVON HOLD 2 3 2 1 4 FG 5 2bit 112 6-7 2byte 8-11 4byte 12-13 2byte 14-17 4byte 18-19 2byte 0 IN5 IN4 IN3 IN2 IN1 IN0 1 FLGTH JOG(+) JOG(-) SETUP RESET DRIVE SVON HOLD 2 3 2 1 4 FG 5 2bit 6-7 2byte 8-11 4byte 113 12-13 2byte 14-15 2byte 16-17 2byte 18-19 2byte 20-21 (2byte) 22-23 2byte 24-27 14byte 28-31 24byte 32-35

JXCx-OMT0028CN

9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40 11.1 . 40 11.2 (IN Data) . 46 11.3 (IN Data). 46 11.4 (OUT Data) . 48 12.LEC . 49 12.1GW LEC . 49 12.2GW LEC . 50 13./ . 51 14./ . 52 14.1 . 52 14.2 . 53 14.3 . 54 14.4 . 55 14.5 . 56 14.6 . 56 2 - 15. . 57 15.1 / . 57 15.2 . 57 15.3 . 59 15.4 . 59 15.5 . 60 15.6 . 60 15.7 . 60 15.8LEC

180

Workpiece mass: 0.05 kg Pressure 0.6 MPa 30 0.5 25 0.4 Gripping force (N) 20 0.3 15 13 0.2 10 0.1 5 0 20 30 50 60 40 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.4 MPa).

3

Symbol -X2172 With Boss in Head End 3 Z X2172 MKB Bore size Stroke Rotary direction Body option With boss in head end 2 Bore size 20 25 32 40 50 63 Ah9 13 15 21 28 35 35 0 0.043 0 0.043 Ah9 0 0.052 0 0.052 0 0.062 0 0.062 Symbol -X2177 The Dimension of Head End Flange is the Same as the Current MK and MK2 Series 4 Z X2177 MKG Bore size Stroke Rotary direction Body option The dimension of

ML2B

Applicable cylinder ML2B25 ML2B32 ML2B40 MY-S25A M6 x 1 35 50 8 5 9.5 5.5 B MY-S32A M8 x 1.25 45 64 11.7 6 11 6.6 B Guide for Side Support Application For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight. In such a case, use a side support in the middle section.

MQQ

TC TH TV TW TX TY MI W S CJ-T010B 6, 10 4.5 29 40 22 32 12 CEP1 CJ-T016B 16 5.5 35 48 28 38 16 Note) For details, refer to page 10-5-24.

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

SL5200

pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is a registered trademark of Haynes International.

Compact Type

6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6, 10 Auto switch model Bore size Operating

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

1 Speed Controller with One-touch Fittings Panel Mount Type Series AS1F-3 In-line Type Model Panel mount thickness: 35 mm at the maximum Applicable tubing O.D.