CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

Compact 5-Port Solenoid Valve

4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

MY1

4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM40-15AA5905 GMY40 RCS-12 TMY-40 C-4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 2 2 2 2 2 4 Note) Two types of dust seal band are available

LEC-OM02904

UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

25/3 (A/BEA/EB) Grommet Cv b C (dm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Actuation type Valve model Actuation type 1, 5, 3 L/M plug W M8 L/M plug W M8 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal (sbar)) Cv b C (dm3/ (sbar)) Cv b C (dm3/ (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 108 133 (sbar)) (sbar)) Single

CRB2/CRBU2/CRB1

D2 J K T J K T J K T Size C2 Y = 50 4 to 39.5 Y3 3 to 11.9 C1 L2 = 50 3 to 11.9 X3 4 to 39.5 63 Y3 3 to 14.9 4 to 45 63 3 to 14.9 X3 4 to 45 D2 = L1 = C2 = C 80 Y3 3 to 16.9 4 to 53.5 80 3 to 16.9 X3 4 to 53.5 X = 100 Y4 3 to 24.9 5 to 65 100 3 to 24.9 X4 5 to 65 80 Simple Specials Series CRB1 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A45 Symbol: A46 The short

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

LJ1H

B A C D 3 4 Standard Motor Series LJ1H10 Motor Output Rolled Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 NB 1 F 2 Cable entry direction Top entry Power supply voltage 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction Cable length Left entry 1 2 F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry

Free Mount Cylinder

4, !5, !6 Seal kit includes !4, !5, !6.

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

I/O Configurator (NFC version)

The Remote cannot be reset when Power off. (4) Confirm that the radio button "Pairing mode" is checked. (3) (2) (4) Pairing check window (Wireless Remote (2)) -92No.EX-OMV0017-C 6.5.

IDU/IDF

Standard Note 4) Note 4) Note 4) Note 4) Note 4) Note 4) Refer to pages 19 and 20 for further information on options.

Table of Contents

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (