SYJ300-OMU0003

2000mm 25 2500mm 30 3000mm 50 5000mm Assy Ass M8 1300mm y <1> 2000mm W1WA1300mm SYJ312-5LOZ-M3 SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13 No.SYJ300-OMU0003 SYJ Series M8 10COM2 B 12 DCU+COM-COM 1 3 4 L 300mm V100-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm

CRJ

Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Guide Table Series MGF ø40, ø63, ø100 1

+ Stroke B + Stroke Dimensions GB 40 63 100 A B Bore size (mm) 36.5 58 48.5 GB 38 73 61.5 38 78 66.5 Dimensions other than the above are the same as standard products.

Compact Vacuum Ejector Series ZQ

L Nil B LO Note) Only the "Nil" type is available with a latching type.

ZQ

b view 4 6 2 a 5 a 5 5 Component Parts No.

02-mgp-e

MGP16-A-PS 16 20 25 32 40 50 63 80 100 MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS @6 @7 @8 @9 #0 #1 Piston seal NBR MGP20-A-PS Rod seal NBR MGP25-A-PS Cushion seal Urethane MGP32-A-PS Set of left nos. @6, @7, @8, @9, #0, #1 Gasket A NBR MGP40-A-PS MGP50-A-PS Gasket B NBR MGP63-A-PS Gasket C NBR MGP80-A-PS MGP100-A-PS Seal kit includes

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Grommet Valve model Flow rate characteristics Weight C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) b Cv b Cv b Cv b Cv VO317 VO317V (Vacuum spec. type) VO317E (Continuous duty type) 0.32kg 2.0 0.11 0.47 2.2 0.12 0.49 2.0 0.14 0.45 2.1 0.14 0.48 1444 A VT317 Series 3 Port Solenoid Valve Direct

HRX-OM-W032

For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Nozzle Type Ionizer

When bringing into a clean room, flush for several minutes and confirm the required cleanliness before use. Mounting Warning 1. Reserve enough space for maintenance, piping and wiring. Part A Part B 5. Avoid using in a place where noise (electromagnetic wave and surge) is generated.

V100

Other dimensions are same as grommet type. 4-2-6 7 Series V100 Manifold Specifications Manifold Specifications Type S41 Specifications V100 Single base type/B mount Manifold Common SUP/Common EXH P (SUP)/R (EXH) type SY 2 to 20 stations Valve stations Location Base Output port porting specifications SYJ Direction Side 1, 2, 3 port Port size M5 x 0.8 VK Note 1) V114(A) and V124(A) cannot be

LECP6_C

B-1 2 L A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 14.2 2 1 (8) 14 18 B1 A1 17.7 5 6 2 1 A6 B6 15 16 11 30.7 112 [820m] A B-1 2 A A-1 1 L B B-2 6 8 8m B A-2 5 COM-A/COM B-3 3 A 10m COM-B/ A-3 4 B 15m Shield C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6

Digital pressure switch for energy-saving control ejector

P_1 = A-(A-B)/4 A = Maximum pressure value H_1 = | (A-B)/2| B = Minimum pressure value To clear the stored auto-preset settings, press the and buttons simultaneously for 1 second or longer. -29No.TQ0010298-OM003-B [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5% R.D.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !3 i o MG CX y u Dy -X 20Data CY1F15 Detailed view of driving cylinder CY1F25 Detailed view of driving cylinder Section A-A' Note Component Parts Material Nickel plated Zinc chromated Description Body (rodless cylinder) Body End cover A End cover B Cylinder tube Description No. Note No.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

) Body End cover A End cover B Cylinder tube Description No.

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.