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SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side. (Factory assembled spacer will be shipped with the orientation shown in the figure.)

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

X) Y Max.

Series VCL

1 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Series VCS

1 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. x 1 3 stns. x 3 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

Y, Z directions for 2 hours each 100m/s2 in X, Y, Z directions 3 times each 01 type: R 1/8, M5 x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. x 1 3 stns. x 3 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

1 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Floating Joint/Stainless Steel Type Series JS

0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5 0.5 0.75 1 10 10, 16 20 25, 32 40 50, 63 80 210 1100 2500 6000 11000 1MPa or less Note 2) 5 to 60C 3.5MPa or less Note 1) Use the applicable cylinder bore size as a guide.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

2/3 Port Solenoid Valve for Chemicals

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

Speed Controller with

n pcs.+ L16 x 2 L8 x n pcs.+ L17 x 2 L8 x n pcs.+ L25 x 2 L8 Refer to page 6 for L8.

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 71.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 65.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 71.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 65 lb